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Device and method for removing film from green ceramic sheet

A green ceramic sheet and membrane device technology, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve the problems of lower lamination efficiency and precision, difficulty in aligning layers, and dimensional changes, etc., to improve stacking Chip efficiency and accuracy, and the effect of improving alignment accuracy

Active Publication Date: 2019-04-09
THE 41ST INST OF CHINA ELECTRONICS TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The green ceramic sheet will be pulled and bent, which will easily lead to dimensional changes, and it will be difficult to align the layers during the subsequent lamination process; in addition, static electricity will be generated during the separation process between the polyester film and the green ceramic sheet. Due to the influence of static electricity, the Due to the electrostatic attraction between the green ceramic sheets in the subsequent lamination alignment process, it is difficult to fine-tune their position, which reduces the lamination efficiency and accuracy

Method used

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  • Device and method for removing film from green ceramic sheet
  • Device and method for removing film from green ceramic sheet
  • Device and method for removing film from green ceramic sheet

Examples

Experimental program
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Effect test

Embodiment 1

[0040] combine figure 1 As shown, a device for removing film from a green ceramic sheet includes a vacuum chuck 1 , a fluid control valve 2 and a vacuum generating device 3 . A sealed cavity 4 communicating with the lower surface of the vacuum chuck 1 is provided below the lower surface of the vacuum chuck 1 . The sealed cavity 4 is connected with the fluid control valve 2 through the pipeline A, and the fluid control valve 2 is connected with the vacuum generator 3 through the pipeline B.

[0041] Through the above design, it can be ensured that the green ceramic sheet 6 can be adsorbed on the upper surface of the vacuum chuck 1 .

[0042] Specifically, such as figure 2 As shown, the film removal device also includes a vacuum suction cup placement platform 7, on which a groove 8 with a shape and a size adapted to the vacuum suction cup is provided on the vacuum suction cup placement platform 7, and when the vacuum suction cup is placed in the groove 8, A sealed cavity 4 i...

Embodiment 2

[0049] combine image 3 As shown, except that the following technical features of this embodiment 2 are different from those of the reference document 1, other technical features can refer to the above-mentioned embodiment 1.

[0050] The film removing device in this embodiment 2 also includes a static elimination brush 9, which is used to eliminate static electricity generated on the surface of the green ceramic sheet 6 after removing the polyester film 5, which is beneficial to improving the lamination efficiency and accuracy.

[0051] Specifically, the electrostatic elimination brush 9 is grounded through the metal wire C.

Embodiment 3

[0053] combine Figure 4 As shown, this embodiment 3 describes a method for removing the film of a green ceramic sheet, which is based on the device for removing the film of the green ceramic sheet in the above-mentioned embodiment 1, which includes the following steps:

[0054] a. Place the green ceramic sheet 6 flat on the upper surface of the vacuum chuck 1 so that the side to which the polyester film 5 is adhered faces upward, and adjust the position of the green ceramic sheet 6 so that it is aligned with the upper surface of the vacuum chuck 1;

[0055] b Turn on the vacuum generating device 3 and the fluid control valve 2, and the green ceramic sheet 6 is adsorbed on the upper surface of the vacuum chuck 1;

[0056] c separate the polyester film 5 from a corner of the green porcelain sheet 6, and separate the polyester film and the green porcelain sheet along the diagonal direction;

[0057] d Close the fluid control valve 2, and remove the green ceramic sheet 6.

[00...

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Abstract

The invention discloses a film-removing device and method for green ceramic sheets. The device comprises a vacuum chuck, a fluid control valve and a vacuum generating device; a sealed cavity communicated with the lower surface of the vacuum chuck is provided below the lower surface of the vacuum chuck; the sealed cavity is connected to the fluid control valve through a pipeline Connection, the fluid control valve is connected with the vacuum generating device through the pipeline. The invention can ensure that the green ceramic sheet will not be deformed when the polyester film is removed by vacuum-adsorbing the green ceramic sheet on the upper surface of the vacuum chuck, so the size of the green ceramic sheet will not change, which is beneficial to improve the lamination time. In addition, static electricity will be generated when the polyester film is removed from the green ceramic sheet. The present invention uses a static elimination brush to guide away the static electricity on the green ceramic sheet, so that the green ceramic sheets will not be difficult due to electrostatic attraction when stacking the sheets. Adjust the position to improve lamination efficiency and precision.

Description

technical field [0001] The invention relates to a film-removing device and method for green ceramic sheets. Background technique [0002] The green ceramic sheet is the most critical raw material in the LTCC (low temperature co-fired ceramics) process. It is small in thickness and soft in texture, and is easily deformed or even damaged during processing. Therefore, the green ceramic sheet adheres to a layer of polyester during casting. On the film, the polyester film is soft, tough, and strong, and is used to keep the green ceramic sheet from deformation during transportation and processing. [0003] The LTCC process is divided into film process and non-film process: [0004] In the filming process, the green ceramic sheet is always covered with a polyester film during the punching, hole filling and screen printing processes, and the polyester film keeps the green ceramic sheet from deformation. After the green ceramic sheet has been punched, filled, and screen-printed cir...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/683
CPCH01L21/67126H01L21/6838
Inventor 宋振国王斌胡莹璐桑锦正付延新赵秉玉路波
Owner THE 41ST INST OF CHINA ELECTRONICS TECH GRP
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