Multi-stage Magnetic Field Arc Ion Plating Method of Lined Conical Tube and Porous Baffle Composite

Abstract

The invention discloses a lining conical pipe and porous baffle composite multi-level magnetic field arc ion plating method, belongs to the technical field of material surface treatment and aims at solving the problems about pollution of macroparticles and deposition ions in a multi-level magnetic field filtering device to the pipe inner wall and losses of arc plasmas in the transmitting process. The method comprises the steps that firstly, a workpiece to be coated is placed on a sample table in a vacuum chamber, a related power source is turned on, and an outer water cooling system is started; secondly, film deposition is conducted, when the vacuum degree in the vacuum chamber is smaller than 10<-4>Pa, inflation of working gas is conducted, the air pressure is adjusted, a coating power source is started, and meanwhile a bias power source is utilized for attracting arc plasmas at the position of an outlet and conducting energy adjustment; and through stopping and shielding of a shape and structure combination of a lining positive bias conical pipe and porous baffle composite device, the inhibiting effect of a positive bias electric field and the filtering effect of a multi-level magnetic field, the macroparticle defect is effectively overcome, the transmission efficiency of the arc plasmas is guaranteed, technology parameters are set, and film preparing is conducted.

Description

technical field [0001] The invention relates to a composite multistage magnetic field arc ion plating method of a lined tapered tube and a porous baffle, and belongs to the technical field of material surface treatment. Background technique [0002] In the process of preparing thin films by arc ion plating, due to the arc spot current density as high as 2.5~5×10 10 A / m 2 , causing molten liquid metal to appear at the arc spot position on the target surface, which is splashed out in the form of droplets under the action of local plasma pressure, and adheres to the surface of the film or is embedded in the film to form "macroparticles" (Macroparticles) Defects (BoxmanR L, Goldsmith S. Macroparticle contamination in cathodic arc coatings: generation, transport and control [J]. Surf Coat Tech, 1992, 52(1): 39-50.). In the arc plasma, since the movement speed of electrons is much greater than that of ions, the number of electrons reaching the surface of large particles per unit...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the traditional arc ion plating method using low-melting point pure metal or multi-element alloy material and non-metallic material (such as graphite) as the target material, which is easy to produce large particle defects, and the arc plasma transmission efficiency caused by the curved magnetic filter technology. Low-level problems, combined with the multi-stage magnetic field filtering method and the combination of the shape and structure of the lined positive bias conical tube and the porous baffle composite device itself, the mechanical barrier shielding and the composite effect of positive bias electric field attraction, while ensuring the arc The plasma passes through the multi-stage magnetic field filter device and the composite device lined with positive bias conical tube and porous baffle with high transmission efficiency, so that the surface of the workpiece can be continuously and densely prepared with high-quality thin film under the condition of negative bias voltage. At the same time, it can control the addition of elements in the film, reduce the production cost of using alloy targets, improve the deposition efficiency of the film, and reduce the adverse effects of large particle defects on the growth and performance of the film. A composite type of lined conical tube and porous baffle is proposed. multistage magnetic field arc ion plating method

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