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Simultaneous measurement system of six degrees of freedom error with single fiber coupled dual-frequency laser

一种自由度、误差的技术,应用在单根光纤耦合双频激光领域,能够解决长距离测量不便、测量精度影响、影响测量精度等问题,达到隔离热源影响、提高测量精度、测量光路结构简单的效果

Active Publication Date: 2019-08-09
BEIJING JIAOTONG UNIV
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  • Application Information

AI Technical Summary

Problems solved by technology

[0008] According to the existing six-degree-of-freedom error simultaneous measurement system, the measurement optical path is integrated with the laser emission part, and the thermal drift of the laser affects the measurement accuracy; the light source used is a single-frequency laser, and the measurement environment has a great influence on the positioning error interferometric measurement; The moving probe is connected with a cable, which brings inconvenience to long-distance measurement; the influence of light drift is not involved, and for long-distance measurement, this will have a greater impact on measurement accuracy

Method used

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  • Simultaneous measurement system of six degrees of freedom error with single fiber coupled dual-frequency laser
  • Simultaneous measurement system of six degrees of freedom error with single fiber coupled dual-frequency laser

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Embodiment Construction

[0031] Such as figure 1 Shown is the laser emitting unit 1, which utilizes a single fiber coupled dual-frequency laser transmission. It includes a dual-frequency laser 101 , a λ / 4 wave plate 102 , a coupling mirror 103 and a polarization-maintaining fiber 104 in sequence. The dual-frequency laser 101 emits two left and right circularly polarized beams with the same amplitude, opposite polarization directions, and a certain frequency difference. After passing through the λ / 4 wave plate 102, the two circularly polarized beams become two polarized beams. Linearly polarized light with directions perpendicular to each other. The coupling mirror 103 couples the two linearly polarized lights into the polarization-maintaining fiber 104, and rotates the λ / 4 wave plate 102 so that the polarization direction of the two orthogonal linearly polarized lights is aligned with the optical axis direction of the polarization-maintaining fiber 104. Alignment ensures that the frequency differenc...

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Abstract

A laser six-degree-of-freedom error simultaneous measurement system is characterized in that the laser emitting unit (1) is separated from the fixed sensing head (2); The sensing head (2) is connected; the moving target mirror (3) composed of light reflectors (301, 302) and half mirror (303) is arranged on the motion pair of the linear guide rail. By adopting a single polarization-maintaining optical fiber (104) to connect the laser emitting unit (1) and the fixed sensing head (2), the influence of the thermal drift of the laser on the measurement accuracy is isolated, and the volume of the instrument is reduced.

Description

technical field [0001] The invention relates to a method and device for simultaneously measuring up to six degrees of freedom error or motion attitude of an object when it moves along a linear guide rail, in particular to a method and device for measuring up to six degrees of freedom based on a single fiber coupled dual-frequency laser The invention relates to a system for simultaneously measuring degree errors, and also relates to a method for coupling dual-frequency lasers with a single fiber, which belongs to the technical field of optical precision measurement. Background technique [0002] High-precision linear motion components are the motion benchmarks of CNC machine tools, machining centers, three-coordinate measuring machines and other equipment, and play a very important role in the engraving accuracy, machining accuracy and measurement accuracy of these equipment. Any linear motion component has motion errors of six degrees of freedom in space, that is, three line...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02G01B11/03
CPCG01B9/02019G01B9/02003G01B9/02029G01D5/266G01B2290/70G01B11/002G01B11/26G01B11/02G01B11/03G01B11/24
Inventor 冯其波张斌高瞻崔存星
Owner BEIJING JIAOTONG UNIV
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