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Thin film getter activating in low temperature of uncooled focal plane detector and preparation method thereof

A technology of focal plane detectors and getters, which is applied in the direction of electrical components, semiconductor devices, ion implantation plating, etc., can solve the problems of not being able to meet the requirements of small-sized packaging forms and large volumes of getters, and achieve easy mass production Production, reduce production costs, enhance the effect of adhesion

Active Publication Date: 2017-02-15
KUNMING INST OF PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] What the present invention aims to solve is the problem that the getter used in the existing uncooled focal plane detectors has a large volume and cannot meet the requirements of small-sized packaging. Uncooled focal plane detector low temperature activated thin film getter with gas performance and preparation method thereof

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] Embodiment 1: An uncooled focal plane detector low temperature activated thin film getter and its preparation method, the getter includes an adjustment layer and a gas absorption layer, the adjustment layer is deposited on the window of the uncooled focal plane detector, and the gas absorption The layer is deposited on the adjustment layer, the adjustment layer is Ti metal, and the absorption layer is a multi-element alloy formed by Zr, Co and Y materials, wherein the content of Zr is 70wt%, the content of Co is 20wt%, and the content of Y is 10wt%. A dense transition layer is formed between the adjustment layer and the window, the thickness of the transition layer is 20 nm, the thickness of the adjustment layer is 1 μm, and the thickness of the absorption layer is 2 μm.

[0016] The film getter is prepared through the following steps:

[0017] 1) The detector window is cleaned by ultrasonic waves with three kinds of cleaning solutions including toluene, acetone and abs...

Embodiment 2

[0024] Embodiment 2: An uncooled focal plane detector low temperature activated thin film getter and its preparation method, the getter includes an adjustment layer and a gas absorption layer, the adjustment layer is deposited on the window of the uncooled focal plane detector, and the gas absorption The layer is deposited on the adjustment layer, the adjustment layer is Zr metal, and the absorption layer is a multi-element alloy formed by Zr, Co and La materials, wherein the Zr content is 80 wt%, the Co content is 10 wt%, and the La content is 10 wt%. A dense transition layer is formed between the adjustment layer and the window, the thickness of the transition layer is 20 nm, the thickness of the adjustment layer is 1 μm, and the thickness of the absorption layer is 2 μm.

[0025] The film getter is prepared through the following steps:

[0026] 1) The detector window is cleaned by ultrasonic waves with three kinds of cleaning solutions including toluene, acetone and absolut...

Embodiment 3

[0033] Embodiment 3: An uncooled focal plane detector low temperature activated thin film getter and its preparation method, the getter includes an adjustment layer and a gas absorption layer, the adjustment layer is deposited on the window of the uncooled focal plane detector, and the gas absorption The adjustment layer is deposited on the adjustment layer, the adjustment layer is AL metal, and the absorption layer is a multi-element alloy formed by Zr, Co, Y and La materials, in which the content of Al is 70 wt%, the content of Co is 25 wt%, and the content of Y is 2 wt%. , La content is 3%. A dense transition layer is formed between the adjustment layer and the window, the thickness of the transition layer is 50 nm, the thickness of the adjustment layer is 2 μm, and the thickness of the absorption layer is 5 μm.

[0034] The film getter is prepared through the following steps:

[0035] 1) The detector window is cleaned by ultrasonic waves with three kinds of cleaning solut...

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PUM

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Abstract

The invention relates to a thin film getter activating in low temperature of an uncooled focal plane detector and a preparation method thereof and the thin film getter activating in low temperature has the performance of low-temperature activation and high gas absorbing. The getter comprises an adjustable layer and an air sucking layer, wherein the adjustable layer is deposited on a window opening of the uncooled focal plane detector and the air sucking layer is deposited on the adjustable layer. The adjustable layer is made of anyone of the following metal comprising Ti, Zr, AL, Cr, Cu, Fe, Pt or Ru, and the sucking layer is made of multi-component alloy comprising the two materials of Zr and Co and at least one of the materials of Y, La and Ce. An extremely tight transition layer is formed between the adjustable layer and the window opening, the thickness of the transition layer is 20-50 nm, the thickness of the adjustable layer is 1-2 [mu]m, and the thickness of the sucking layer is 2-5 [mu]m. The thin film getter of a porous structure is adopted, the transition layer is relatively-extremely tight, and is relatively matched with infrared window metal work functions, so that the adhesive force of the thin film getter on a substrate is reinforced.

Description

technical field [0001] The invention relates to an uncooled focal plane detector, in particular to a low-temperature activated thin-film getter for an uncooled focal plane detector with low-temperature activation and high gas-absorbing performance and a preparation method thereof. Background technique [0002] The performance of the uncooled focal plane detector needs to be maintained in a high vacuum environment, and the components of the detector are degassed due to the outgassing of the internal materials, resulting in a decrease in vacuum. In order to achieve the purpose of maintaining the vacuum quality and ideal working environment inside the uncooled focal plane detector assembly, a getter will be added inside the detector, and the getter will be used to absorb the gas generated inside the detector. Currently, the commonly used getter materials are: Columnar getters and flake getters, but both are large in size and high in cost. During use, particles are prone to drop...

Claims

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Application Information

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IPC IPC(8): C23C14/30C23C14/14H01L31/09H01L31/0216
CPCC23C14/14C23C14/30H01L31/0216H01L31/09
Inventor 袁俊赵鹏黎秉哲何雯瑾信思树苏玉辉龚晓霞普朝光莫镜辉
Owner KUNMING INST OF PHYSICS
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