Sensing array capable of implementing high-accuracy synchronous measurement of three-dimensional deformation and three-dimensional pressure
A high-precision synchronous sensor array technology, applied in the direction of electric/magnetic solid deformation measurement, force measurement, and measurement devices, can solve the problems of low measurement accuracy, insufficient compact structure, and low spatial resolution, and achieve high measurement sensitivity , compact structure, and the effect of improving spatial resolution
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[0039] The sensor array (the overall size of the sensor array structure is consistent with the seat interface) that can realize three-dimensional deformation and three-dimensional pressure simultaneous measurement with high precision will be described as an example below.
[0040] It includes a lower flexible circuit board 6, a lower elastic polymer substrate 5 with grooves, an array of capacitor units 4 and elastic piezoresistive units 3 arranged in the grooves, an upper elastic polymer substrate 2, and an upper flexible circuit board 1; The unit 4 and the elastic piezoresistive unit 3 are integrated into a mesh sensing array structure, wherein each capacitive unit 4 is adjacent to six elastic piezoresistive units 3 .
[0041] The central contact electrodes 601 and peripheral contact electrodes 602 on the lower flexible circuit board 6 according to the present invention are in the shape of convex cylinders, and each central contact electrode 601 and six adjacent peripheral con...
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