Preparation method of millimeter-scale single-layer single crystal graphene
A single crystal graphene, millimeter-scale technology, applied in the direction of single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve problems such as reducing electron mobility, thermal conductivity, reducing graphene-related properties and application value , to achieve the effect of simple preparation process and broad application prospects
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[0019] A method for preparing millimeter-scale single-layer single-crystal graphene, the specific steps are:
[0020] 1) Cut the copper foil as the growth substrate into a rectangular shape with a size of 2.5cm*2.5cm;
[0021] 2) Put the cut copper foil into dilute hydrochloric acid for ultrasonic cleaning, then transfer it to acetone solution for ultrasonic cleaning, and dry it with nitrogen after cleaning;
[0022] 3) Put the copper foil into the quartz tube of the tube furnace, pass in 300 sccm of Ar and heat up to 1070°C;
[0023] 4) Pass 300sccmAr and 50sccmH at 1070°C 2 And annealed at high temperature for 4 hours;
[0024] 5) After high temperature annealing, 0.5 sccm of CH was introduced at 1070°C 4 and 50sccmH 2 Grow graphene for 2 hours;
[0025] 6) After the growth is over, turn on the tube furnace to cool down the sample rapidly and inject 300sccmAr and 4sccmH 2 , and the samples were taken out after cooling down to room temperature.
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