Universal center-adjustment loading mechanism for upper disc

Abstract

The invention discloses a universal center-adjustment loading mechanism for an upper disc. The loading mechanism comprises a main air cylinder. A piston rod of the main air cylinder is connected with a sensor and a connecting shaft. The connecting shaft is connected with a universal cross shaft upper joint. A universal joint and a universal cross shaft lower joint are arranged below the universal cross shaft upper joint. A mandrel is arranged at the outer sides of the universal cross shaft upper joint, the universal cross shaft lower joint and the universal joint in a sleeving manner. An upper bearing is arranged at the upper side of the mandrel, and a lower bearing is arranged at the lower side of the mandrel. An outer supporting sleeve is connected to the outer sides of the upper bearing, the lower bearing and the mandrel in a sleeving manner. A swivel joint upper flange is arranged at the top ends of the mandrel, the outer supporting sleeve and a rotary connecting sleeve, and a water-cooling universal shaft assembly is formed. The lower end of the outer supporting sleeve is connected with the upper disc through an upper disc bracket. By means of the mechanism, the center can be adjusted automatically; the radial load or the axial load or the combined load existing in the radial direction and the axial direction at the same time can be borne, and thus center adjustment and stress of an upper disc system are guaranteed; and in addition, buffered unloading of the pressure inertia generated when the upper disc is combined with a lower disc can also be guaranteed.

Description

technical field [0001] The invention relates to the technical field of grinding machines or polishing machines, in particular to an upper plate universal self-aligning loading mechanism. Background technique [0002] The double-sided grinding and polishing equipment uses abrasive media to perform double-sided grinding on the surface of the workpiece through the reverse rotation of the upper and lower working surfaces around the center. In terms of pressure control, multi-stage pressure is traditionally used, and the pressure section is customized by the user. , but there is an impact when the pressure is switched, resulting in a sudden change in the force of the workpiece. Processing efficiency has changed. At the same time, this type of equipment has tended to be high-efficiency, high-precision or ultra-high-precision, and the fit of the upper and lower working surfaces of the equipment is very important to the quality of the processed products. If the two working surfaces...

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Problems solved by technology

[0002] The double-sided grinding and polishing equipment uses abrasive media to perform double-sided grinding on the surface of the workpiece through the reverse rotation of the upper and lower working surfaces around the center. In terms of pressure control, the traditional multi-stage pressure is used, and the pressure section is customized by the user. , but there is an impact when the pressure is switched, resulting in a sudden change in the force of the workpiece. On the other hand, due to the instability of the system pressure, the processing parameters (pressure, time, speed, and grinding liquid particle size, concentration, flow) Processing efficiency has changed

At the same time, this type of equipment has tended to be high-efficiency, high-precision or ultra-high-precision, and the fit of the upper and lower working surfaces of the equipment is very important to the quality of the processed products. If the two working surfaces are rigidly contacted and bonded directly, the two working surfaces The coincidence and parallelism of the surfaces cannot be guaranteed, and the workpiece is easily damaged and cracked when the two working surfaces are in contact. Therefore, it is necessary to adopt a structure with automatic centering, pressure buffering and pressure feedback complementary closed-loop control functions on the upper plate, so as to ensure that the two working surfaces The flexible contact of the two working surfaces achieves the purpose of precise control of the fit, parallelism and pressure of the two working surfaces

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