Thermostatic control system suitable for excimer laser device

Abstract

The invention discloses a thermostatic control system suitable for an excimer laser device. The system comprises a main circuit and a branch circuit and further comprises a solenoid valve, a first flow sensor, a diverter and a collector which are arranged on the main circuit, and a first proportioning valve, a second proportioning valve, a second flow sensor, a third flow sensor, an automatic temperature control chamber and a first non-return valve which are arranged on the branch circuit, a lower computer and an industrial control computer communicating with the lower computer, wherein the industrial control computer is used for sending an instruction to control repetition frequency of the excimer laser device and transmitting the repetition frequency information to the lower computer through an RS485 protocol, and the lower computer is used for correspondingly controlling flows of the first proportioning valve and the second proportioning valve according to the repetition frequency information and further taking the repetition frequency as former feedback to automatically control the temperature of the automatic temperature control chamber to stay at a target level.

Description

technical field [0001] The invention belongs to the field related to temperature control of excimer lasers, and more specifically relates to a constant temperature control system suitable for excimer lasers. Background technique [0002] As an ultraviolet beam that can be precisely focused and controlled, excimer laser has become the main light source of current lithography devices due to its advantages such as short wavelength, high pulse power density, narrow pulse width, and weak coherence. In recent years, in order to make the width of the spectrum narrower and the laser power higher, the double-cavity structure has been introduced into the design of the laser, and most of the energy input into the excimer laser is converted into heat, which will affect the working gas. The temperature and the temperature of the working gas have a great influence on the light output performance and life of the laser. [0003] Relevant personnel in this field have done some research on h...

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Problems solved by technology

However, since the temperature control system has no feedback for the repetition rate of the laser and the repetition rate span of the laser is relatively large, the repetition rate of the laser controls the number of pulses per unit time, and the discharge of each pulse generates heat, resulting in a significant difference in the repetition rate. The temperature fluctuation has a great influence, and may even make the temperature exceed the requirement. When the frequency of the laser changes, the temperature control effect is poor, the temperature fluctuates greatly, and the adjustment lags

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