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Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system

A tail gas recovery and adsorption column technology, applied in gas treatment, silicon compounds, climate sustainability, etc., can solve the problem of adsorbent heating efficiency, low cooling efficiency, unsatisfactory hydrogen purity, and poor adsorbent regeneration effect. and other problems to achieve the effect of improving the regeneration effect, reducing the regeneration time and saving the production cost.

Inactive Publication Date: 2016-09-28
成都瑞奇智造科技股份有限公司
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the tail gas recovery system of polysilicon plant, the adsorption column is an extremely critical equipment, which is used to absorb the residual HCL and chlorosilane and other harmful substances in hydrogen, so as to obtain high-purity hydrogen. cost, the adsorbent needs to be regenerated, and the regeneration of the adsorbent requires heating. The existing adsorbent is heated, and the heating efficiency and the cooling efficiency of the adsorbent are not high due to the uneven heating of the adsorbent, resulting in the adsorption of the adsorbent. The regeneration time is too long, and the regeneration effect of the adsorbent is not good, resulting in the hydrogen purity not meeting the requirements

Method used

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  • Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system
  • Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system
  • Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with accompanying drawing, protection scope of the present invention is not limited to the following:

[0018] Such as Figure 1~Figure 4 As shown, the polysilicon tail gas recovery system has a finned sleeve type adsorption column, which includes an adsorption column body 5, a return sleeve 7 and a companion pipe 6, and the companion pipe 6 is spirally installed on the outer tube wall of the adsorption column body 5 , the return sleeve 7 is installed in the adsorption column body 5 through the pipe support plate 4, the return sleeve 7 includes an outer tube 13 and an inner tube 15, in this embodiment, the inner tube 13 and The outer tube 15 is made of metal material, and the metal material is required to have good thermal conductivity, which can quickly realize heat exchange, so as to achieve the purpose of rapid heating or cooling, and also requires high pressure resistance. The inner tube 15 Locate...

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Abstract

The invention discloses a wing-shaped pipe type adsorption column for a polycrystalline silicon tail gas recovery system. The wing-shaped pipe type adsorption column comprises an adsorption column body and a tracing tube, wherein the tracing tube is mounted on the outer casing wall of the adsorption column body; backflow sleeves are mounted in the adsorption column body through supporting plates; each backflow sleeve comprises an outer pipe and an inner pipe; each inner pipe is positioned inside the corresponding outer pipe; a cavity between the outer side wall of each inner pipe and the inner side wall of the corresponding outer pipe serves as a medium passage; a sealing cap for enabling medium to flow back is mounted at the top of each outer pipe; a plurality of fins are mounted on the outer side wall of each outer pipe; an adsorbent filling opening and a hydrogen outlet are also formed in the top of the adsorption column body; an adsorbent discharging opening is formed in the bottom of the adsorption column body; a main hydrogen pipe and a plurality of groups of hydrogen inlet branch pipes are also mounted on the side wall of the bottom of the adsorption column body; the hydrogen inlet branch pipes are connected with the main hydrogen pipe. The wing-shaped pipe type adsorption column has the benefits that the heat exchange efficiency is high; heating is uniform; the production cost is reduced; equipment safety and reliability are improved.

Description

technical field [0001] The invention relates to polysilicon tail gas recovery equipment, in particular to a finned casing type adsorption column for the polysilicon tail gas recovery system. Background technique [0002] In the tail gas recovery system of polysilicon plant, the adsorption column is an extremely critical equipment, which is used to absorb the residual HCL and chlorosilane and other harmful substances in hydrogen, so as to obtain high-purity hydrogen. cost, the adsorbent needs to be regenerated, and the regeneration of the adsorbent requires heating. The existing adsorbent is heated, and the heating efficiency and the cooling efficiency of the adsorbent are not high due to the uneven heating of the adsorbent, resulting in the adsorption of the adsorbent. The regeneration time is too long, and the regeneration effect of the adsorbent is not good, resulting in the hydrogen purity not meeting the requirements. Contents of the invention [0003] The object of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/04C01B3/56C01B33/021
CPCB01D53/0407B01D53/0438B01D2256/16B01D2257/2045B01D2257/2064B01D2258/0216C01B3/56C01B33/021Y02P20/50
Inventor 严冠雄唐联生江伟周术江谢晓丽
Owner 成都瑞奇智造科技股份有限公司
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