Dispatching system and dispatching method based on semiconductor processing equipment production recipe

Abstract

Provided is a dispatching system based on a semiconductor processing equipment production recipe. The invention specifically relates to a dispatching system and a dispatching method. The system comprises an information acquisition module used for acquiring a production recipe in semiconductor processing equipment, a storage module used for storing the production recipe and the information of the semiconductor processing equipment to which the production recipe belongs, an analytical processing module used for analyzing the production recipe, carrying out matching and establishing a matching list, and a dispatching processing module used for judging whether set semiconductor processing equipment has a production recipe matching a wafer lot production recipe of a wafer lot to be processed, generating a judgment result and establishing a dispatching order of the wafer lot to be processed according to the judgment result and the matching list for dispatching. The dispatching order corresponding to a wafer lot can be accurately calculated in real time, the waiting time is reduced effectively for equipment, the utilization rate of equipment is improved greatly, the production cycle of wafer lots is shortened, and invalid operation of a transmission system and engineers is reduced.

Description

Technical field: [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a delivery system and method. Background technique: [0002] In semiconductor manufacturing, due to the complexity of the production process and process, each product uses different types of semiconductor processing equipment with different functions in the production process. Engineers set different production recipes on each semiconductor processing equipment according to the product. The production recipe (EQPRecipe) provides the process steps used when the wafer enters the semiconductor processing equipment for processing and all the parameters used in each process step. The same semiconductor processing equipment can produce different products by setting different production recipes. [0003] The most advanced fabs in the world have realized full automation production (Full Automation), and the most important part of realizing full automation productio...

AI Technical Summary

Problems solved by technology

If the production recipe exists, the wafer batches are allowed to enter the semiconductor processing equipment for production; if the production recipe does not exist, the semiconductor processing equipment will refuse to produce wafer batches, and the above-mentioned real-time delivery due to the absence of the production recipe Failure will cause the failure of fully automated production, which will greatly reduce the utilization rate of semiconductor processing equipment, increase the production cycle of products, and seriously affect the production efficiency of the factory.

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