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MOEMS accelerometer based on planar ring cavity, and manufacturing method of the same

An accelerometer and annular cavity technology, which is applied in the field of optics and micro-electromechanical systems, can solve the problem that performance parameters such as resolution and sensitivity are not easily improved, and achieve the effect of improving sensitivity and reducing loss.

Inactive Publication Date: 2016-03-30
ZHONGBEI UNIV
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Problems solved by technology

[0003] In order to solve the problem that performance parameters such as the resolution and sensitivity of the cantilever beam accelerometer based on integrated capacitors and piezoresistors are not easy to improve, the present invention provides a MOEMS accelerometer based on a planar ring cavity and a manufacturing method thereof

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  • MOEMS accelerometer based on planar ring cavity, and manufacturing method of the same
  • MOEMS accelerometer based on planar ring cavity, and manufacturing method of the same

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Embodiment Construction

[0023] A MOEMS accelerometer based on a planar annular cavity, including an SOI sheet, the substrate silicon in the SOI sheet is used as a base 3, a cantilever beam 4 is etched on one side of the base 3, and a mutual coupled straight waveguide is etched on the top layer of silicon 1 and a ring-shaped racetrack-shaped micro-ring resonator 2, wherein the micro-ring resonator 2 is located on a cantilever beam 4, and gratings 5 ​​are etched at both the incident end and the outgoing end of the straight waveguide 1.

[0024] The above-mentioned manufacturing method based on the MOEMS accelerometer of the planar annular cavity comprises the following steps:

[0025] Step 1: Select the SOI sheet and perform high-temperature pretreatment on the SOI sheet to eliminate the residual stress in the SOI sheet, reduce the structural damage caused by the residual stress, and improve the yield;

[0026] Step 2: Coat AZ5214 photoresist on the pretreated SOI silicon wafer. When coating the photor...

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Abstract

The invention belongs to the optical field and the micro-electro-mechanical system field, and specifically relates to an MOEMS accelerometer based on a planar ring cavity, and a manufacturing method of the same. The accelerometer comprises a substrate, a cantilever beam, gratings, a straight waveguide and a micro-ring resonant cavity. The basic operating principle of the accelerometer includes: an incident light is coupled with the straight waveguide through the gratings; the light transmitted in the straight waveguide is coupled with the micro-ring resonant cavity in an evanescent field mode; the light satisfying a resonance condition generates resonance in the micro-ring resonant cavity and generates a transmission peak corresponding to the resonance; and when the system is impacted by external forces, under the effect of the accelerated speed, the cantilever beam is deformed because of the effect of inertia force to enable the micro-ring resonant cavity integrated on the cantilever beam to be lightly deformed, so that the effective refractive index of the micro-ring resonant cavity is changed and then the resonance peak of the micro-ring resonant cavity offsets and the corresponding accelerated speed value can be calibrated by means of the offset generated through measurement of a resonant point.

Description

technical field [0001] The invention belongs to the fields of optics and micro-electromechanical systems, in particular to an MOEMS accelerometer based on a planar ring cavity and a manufacturing method thereof. Background technique [0002] Accelerometers are now widely used in the automotive industry, robotics, wearable devices, engineering vibration measurement, geological exploration, navigation systems, aerospace and other fields. Products with small changes will use accelerometers. Today, with the continuous advancement of micro-electro-mechanical system (MEMS) technology, the research and development of accelerometers has made great progress, the volume has been continuously reduced, and the sensitivity, stability, and anti-interference ability have been continuously improved. Various micro-miniature accelerometers have been It has been widely used commercially. With the development of Micro-Opto-Electro-Mechanical Systems (MOEMS), many fields, such as the inertial ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/097B81C1/00
Inventor 闫树斌张志东崔建功薛晨阳张文栋王瑞兵骆亮陈慧斌苏莹
Owner ZHONGBEI UNIV
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