Device and method for machining materials by combining electrochemical discharging and laser

Abstract

The invention provides a device and method for machining materials by combining electrochemical discharging and laser, and belongs to the field of non-traditional combined machining. Combined machining through electrochemical discharging and laser is carried out on transparent crisp and hard materials, an electrochemical discharging circuit is formed in an electrolyte solution through an auxiliary electrode and a tool electrode, a laser beam generates a focus on the surface of a sample, when energy reaches a certain value, impact stress and cavitation stress are formed, laser energy and spark discharging cooperatively act on a workpiece from an upper direction and a lower direction, effective combination of two kinds of energy is guaranteed, the energy density of a machining area is improved, and the corrosion removing speed of the machined sample is increased.

Description

technical field [0001] The invention belongs to the field of special compound processing, in particular to a device and a method for compound processing materials by electrochemical discharge and laser. Background technique [0002] Insulating hard and brittle materials represented by glass have excellent properties such as high hardness, chemical corrosion resistance, transparency and good biocompatibility. Micro-accelerators, micro-reactors, micro-pumps, medical devices and optics in micro-electromechanical systems There are more and more applications in the system. Especially in some complex, harsh or extreme working environments, the performance requirements for tiny devices such as corrosion resistance, high temperature resistance, and wear resistance are very strict. If some parts are replaced with insulating hard and brittle materials, it can be very good Solve corrosion problems. In daily life, the demand for glass parts is also increasing. The Touch ID sensor, rea...

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Problems solved by technology

This method improves the processing accuracy of the processed surface of the sample, but due to the limitation of the size of the conductive grinding wheel, this method is not suitable for processing small-sized features such as micro-holes.

Scholar Guo Yongfeng et al. proposed a method of using physical inflation to assist electrochemical discharge machining in the article "Research on Electrochemical EDM Composite Machining Process for Non-conductive Materials". Inflate a small amount of gas to make up for the lack of gas generated by electrolysis alone. This method enhances the stability of the generated gas film and improves the processing efficiency. However, due to the need for gas filling, the tool electrode must have a through hole, which increases the electrode's capacity. size, thus limiting the application of this method in micro-scale processing

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