A kind of processing method of quartz glass wafer blank

Abstract

The invention discloses a processing method for a quartz glass wafer blank. The first traction system is combined with a fused quartz glass ingot to draw downward, and then the second traction system is combined with a wafer blank and simultaneously drawn downward. ;When the wafer blank reaches the required length, it is cut under the second traction system; the separated second traction system is still drawn downward at the original speed, and at the same time, the first traction system is quickly lowered to the bottom of the equipment to unload the wafer blank, Cooling; the first traction system rises rapidly and combines with the bottom of the wafer blank, and then releases the combination of the second traction system; the second traction system rises, recombines with the upper part of the wafer blank, and continues to move simultaneously to achieve quartz Continuous processing of glass wafer blanks. The invention realizes the continuous processing of the quartz glass ingot, maximally pulls the molten glass ingot, significantly reduces the production space, and saves equipment cost and production time.

Description

technical field [0001] The invention relates to a processing method of quartz glass, in particular to a processing method of a quartz glass wafer blank. Background technique [0002] Quartz glass is widely used in the semiconductor integrated circuit industry due to its good performance. Wafers are the core of semiconductor integrated circuits. Photolithography technology has become the main method of producing wafers due to its good technical characteristics. Quartz glass wafer is a semiconductor integrated circuit product processed by photolithography technology. Quartz glass is an essential material for this process, and its shape and size vary depending on the size of the wafer being produced. Quartz glass has a high softening temperature and melting temperature, and high viscosity at high temperature, so traditional casting and mold forming methods cannot realize the molding of quartz glass blanks for wafers. The conventional specification of quartz glass ingots is 28...

AI Technical Summary

Problems solved by technology

However, when using this method, it is impossible to prepare a longer blank for quartz glass wafers, and continuous operation cannot be realized, and the processing time is long, which is not conducive to industrial scale-up; The cooling of the furnace is slow, prolonging the intermittent period and reducing production efficiency

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