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Photoelasticity principle based flexile microprobe and application method thereof

A micro-probe and photoelastic technology, applied in the field of flexible micro-probes, can solve the problems of inconvenient operation and alignment, high cost, and achieve the effects of simple production, short production cycle and low processing cost.

Inactive Publication Date: 2015-07-29
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the use of atomic force microscope cantilever beam equipment is expensive, and it is not easy to operate and align

Method used

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  • Photoelasticity principle based flexile microprobe and application method thereof
  • Photoelasticity principle based flexile microprobe and application method thereof
  • Photoelasticity principle based flexile microprobe and application method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～4

[0068] When the arc notch radius of the flexible hinge stress measurement area 2 is 140 μm, take the width of the flexible hinge measurement area as 50 μm, 60 μm, 70 μm, and 80 μm to measure the stress, and apply a force of 200 μN to the force-bearing end of the microprobe, and calculate Proportional coefficient к, the result is as follows:

[0069]

Embodiment 5～8

[0071] When the arc notch radius of the flexible hinge stress measurement area 2 is 180 μm, take the width of the flexible hinge measurement area as 50 μm, 60 μm, 70 μm, and 80 μm to measure the stress, and apply a force of 200 μN to the force-bearing end of the microprobe, and calculate Proportional coefficient к, the result is as follows:

[0072]

Embodiment 9～12

[0074] When the arc notch radius of the flexible hinge stress measurement area 2 is 220 μm, take the width of the flexible hinge measurement area as 50 μm, 60 μm, 70 μm, and 80 μm to measure the stress, and apply a force of 200 μN to the force-bearing end of the microprobe, and calculate Proportional coefficient к, the result is as follows:

[0075]

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Abstract

The invention discloses a photoelasticity principle based flexile microprobe and an application method thereof. The photoelasticity principle based flexile microprobe, namely an integral structure made of SU-8 photoresist, comprises a microprobe stress end and a microprobe base body. The microprobe base body comprises a base body end and a base body tail. The base body end and the microprobe stress end are arranged on the same side of the base body tail to form a microprobe structure. The light intensity variation of polarized light transmitting a flexible hinge stress measurement area and a measurement light path is measured, a relationship between the light intensity variation and stress magnitude of the microprobe stress end is established, and accordingly, measurement of micro force can be achieved. The photoelasticity principle based flexile microprobe made of the SU-8 photoresist is low in processing technique cost and high in stability and has the advantages of chemical corrosion resistance, good mechanical property and biocompatibility, high light stress coefficient and the like; moreover, the photoelasticity principle based flexile microprobe of the integral structure is free from assembly, simple to produce and beneficial for functionalization of microoperation techniques in the fields of biomedicine, material chemistry and the like.

Description

technical field [0001] The invention relates to the technical field of micro-sensors in the technical field of micro-electro-mechanical systems, in particular to a flexible micro-probe based on the principle of photoelasticity and a method for using the same. Background technique [0002] With the rapid development of biomedicine, material chemistry and other fields, there are more and more studies on objects with micro-nano scale, such as the detection of cell surface tension in biomedicine, and the stretching of carbon nanotubes in material chemistry. Measurement of strength and torsional strength, etc. Therefore, it is of great significance to research and develop microprobes that can effectively detect the magnitude of force at the microscale, which can effectively promote the development of these disciplines. [0003] At present, the main types of microprobes are: 1. Using the comb structure, the measurement of the force at the end of the microprobe can be realized by ...

Claims

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Application Information

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IPC IPC(8): G01L1/24
Inventor 褚金奎李双亮张然闵健陈永台
Owner DALIAN UNIV OF TECH
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