A universal self-aligning loading mechanism for the upper plate of a double-sided polishing machine

Abstract

The invention discloses a universal aligning and loading mechanism for an upper plate of a double-sided polishing machine. The universal aligning and loading mechanism comprises a primary air cylinder which is used as a positive-pressure and negative-pressure source, wherein the primary air cylinder is fixedly connected with a rack beam through an air cylinder mounting plate; a secondary air cylinder is connected below the primary air cylinder, a guide rod supporting plate is fixedly connected with the lower end surface of the secondary air cylinder; a piston rod of the secondary air cylinder is connected with a connecting rod below the secondary air cylinder through a tension sensor; a joint bearing is fixed on the connecting rod; a universal rod is arranged in the joint bearing in a penetration manner; the universal rod is fixedly connected with a bearing base; an outer supporting sleeve is arranged at the outer side of the bearing base; the outer supporting sleeve is fixedly connected with a bearing plate below the outer supporting sleeve; the bearing plate is fixedly connected with a supporting ring above the bearing plate through a supporting rod; the bearing plate is further fixedly connected with the upper plate below the bearing plate through the supporting rod. The aligning and loading mechanism disclosed by the invention realizes flexible contact of two working surfaces, so that the fitting coincidence, the parallelism degree and the pressure of the two working surfaces are precisely controlled.

Description

technical field [0001] The invention relates to the structural field of a grinding / polishing machine, in particular to an upper disc universal self-aligning loading mechanism of a double-sided polishing machine. Background technique [0002] The double-sided grinding and polishing equipment uses the abrasive medium to perform double-sided grinding on the surface of the workpiece through the reverse rotation of the upper and lower working surfaces around the center. In terms of pressure control, multi-stage pressure is traditionally used, and the pressure section is customized by the user. However, there is an impact when the pressure is switched, resulting in a sudden change in the force of the workpiece. On the other hand, due to the instability of the system pressure, the processing parameters (pressure, time, speed, and grinding liquid particle size, concentration, flow rate) and processing Efficiency has changed. At the same time, this type of equipment has tended to be...

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Problems solved by technology

[0002] The double-sided grinding and polishing equipment uses the abrasive medium to perform double-sided grinding on the surface of the workpiece through the reverse rotation of the upper and lower working surfaces around the center. In terms of pressure control, multi-stage pressure is traditionally used, and the pressure section is customized by the user. However, there is an impact when the pressure is switched, resulting in a sudden change in the force of the workpiece. On the other hand, due to the instability of the system pressure, the processing parameters (pressure, time, speed, and grinding liquid particle size, concentration, flow rate) and processing Efficiency has changed

At the same time, this type of equipment has tended to be high-efficiency, high-precision or ultra-high-precision, and the fit of the upper and lower working surfaces of the equipment is very important to the quality of the processed products. If the two working surfaces are rigidly contacted and bonded directly, the two working surfaces The coincidence and parallelism of the surfaces cannot be guaranteed, and the workpiece is easily damaged and cracked when the two working surfaces are in contact. Therefore, it is necessary to adopt a structure with automatic centering, pressure buffering and pressure feedback complementary closed-loop control functions on the upper plate, so as to ensure that the two working surfaces The flexible contact of the two working surfaces achieves the purpose of precise control of the fit, parallelism and pressure of the two working surfaces

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