A metal oxide ultraviolet detector

A technology of ultraviolet detectors and oxides, applied in semiconductor devices, sustainable manufacturing/processing, electrical components, etc., can solve the problems of high energy consumption, complicated process, unfavorable popularization, etc., and achieve the promotion of low-temperature conversion, simple preparation process, Effects that are easy to implement

Inactive Publication Date: 2017-03-08
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the existing metal oxide ultraviolet detectors prepared by the solution method need to process the precursor film at high temperature, the volume of the film shrinks greatly and causes high energy consumption, which greatly increases the production cost; at the same time, the metal oxide It will absorb oxygen and form a depletion layer on the surface. When ultraviolet light is applied, the oxygen ions must be desorbed first, thus reducing the photoresponse speed of the ultraviolet detector. Most of the existing processes use purple transparent glass packaging under high vacuum, which is a high-cost process. Complicated, not conducive to mass adoption

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Embodiment 1

[0040] Such as figure 1 As shown: the preparation material of the interdigital electrode 2 is gold, the thickness is 50 nm, the metal oxide nanoparticles are made of zinc acetate dihydrate precursor, and its mixed layer with shellac is made of zinc oxide nanoparticles and shellac, The thickness is 2000nm, wherein the weight ratio of zinc oxide nanoparticles to shellac is 1: 1, and the diameter of zinc oxide nanoparticles is 20 nm.

[0041] The preparation method is as follows:

[0042] ① Thoroughly clean the quartz glass substrate first, then dry it after cleaning;

[0043] ② Vacuum thermal evaporation of interdigitated electrodes on the surface of the quartz glass substrate;

[0044]③ Coating a mixed layer of metal oxide nanoparticles and shellac on the interdigitated electrodes;

[0045] ④Heat the device to 150 ℃ to make the shellac in a fluid state, anneal in an ethanol atmosphere, and the annealing time is 2h;

[0046] ⑤ After the annealing is completed, raise the temp...

Embodiment 2

[0048] Such as figure 1 Shown: the preparation material of the interdigital electrode 2 is gold, the thickness is 50 nm, the metal oxide particles are made of zinc acetate dihydrate, and its mixed layer with shellac is made of zinc oxide nanoparticles and shellac, with a thickness of 2000 nm, wherein the weight ratio of zinc oxide nanoparticles to shellac is 1:1, and the diameter of zinc oxide nanoparticles is 5 nm.

[0049] The preparation method is as follows:

[0050] ① Thoroughly clean the quartz glass substrate first, then dry it after cleaning;

[0051] ② Vacuum thermal evaporation of interdigitated electrodes on the surface of the quartz glass substrate;

[0052] ③ Coating a mixed layer of metal oxide nanoparticles and shellac on the interdigitated electrodes;

[0053] ④Heat the device to 150 °C to make the shellac in a fluid state, anneal in an ethanol atmosphere, and the annealing time is 0.5 h;

[0054] ⑤ After the annealing is completed, raise the temperature to...

Embodiment 3

[0056] Such as figure 1 Shown: the preparation material of the interdigital electrode 2 is gold, the thickness is 20 nm, the metal oxide particles are made of zinc acetate dihydrate precursor, and its mixed layer with shellac is made of zinc oxide nanoparticles mixed with shellac, the thickness 500 nm, wherein the weight ratio of zinc oxide nanoparticles to shellac is 1: 10, and the diameter of zinc oxide nanoparticles is 5 nm.

[0057] The preparation method is as follows:

[0058] ① Thoroughly clean the quartz glass substrate first, then dry it after cleaning;

[0059] ② Vacuum thermal evaporation of interdigitated electrodes on the surface of the quartz glass substrate;

[0060] ③ Coating a mixed layer of metal oxide nanoparticles and shellac on the interdigitated electrodes;

[0061] ④Heat the device to 150 °C to make the shellac in a fluid state, anneal in an ethanol atmosphere, and the annealing time is 0.5 h;

[0062] ⑤ After the annealing is completed, raise the te...

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Abstract

The invention discloses a metal oxide ultraviolet detector, which belongs to the field of photodetectors and solves the problems of harsh preparation environment, low sensitivity and preparation cost of the metal oxide ultraviolet detector in the prior art due to the structure and material of the detection layer. High problems, including quartz glass substrates, interdigital electrodes, mixed layers of metal oxide nanoparticles and shellac; first, a mixed solution composed of metal oxide precursors and shellac was coated on the sputtered interdigitated electrodes. On the quartz glass substrate, after heating pretreatment, the film is solvent annealed with high concentration ethanol vapor, so that the shellac in the mixed film rises to the top of the film; the metal element in the mixed film is coordinated with the hydroxyl group in the shellac, so that the metal The oxide precursor is converted into metal oxide nanoparticles at a lower temperature, and naturally accumulates into a cone-shaped structure; finally, based on the unique thermal polymerization characteristics of shellac, the shellac is cured by continuous heating, and the detection layer of the detector is realized. In-situ packaging.

Description

technical field [0001] The invention belongs to the technical field of sensor preparation, in particular to a metal oxide ultraviolet detector. Background technique [0002] UV detectors can be used in scientific research, military, space, environmental protection and many other industrial fields. For example, in space, it can be used as a detector of solar ultraviolet light in the orbit of a spacecraft; in terms of environmental protection, with the destruction of the atmospheric ozone layer, the monitoring of solar ultraviolet light is becoming more and more important; industrially, ultraviolet light detectors can be used as waste gas and Monitors for automobile exhaust and flame detectors in machine building and other thermal contexts, etc. It also has important military applications, such as in missile guidance and missile early warning and defense systems. Therefore, the development of ultraviolet detectors has important theoretical and practical significance. [000...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/09H01L31/18H01L31/0203
CPCH01L31/09H01L31/18Y02P70/50
Inventor 于军胜韩世蛟王煦范惠东
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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