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Metal oxide ultraviolet detector and production method thereof

An ultraviolet detector and oxide technology, applied in the field of metal oxide ultraviolet detectors, can solve the problems of high energy consumption, complex process, unfavorable popularization, etc., and achieve the effects of promoting low-temperature conversion, simple preparation process and easy implementation

Inactive Publication Date: 2015-07-01
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the existing metal oxide ultraviolet detectors prepared by the solution method need to process the precursor film at high temperature, the volume of the film shrinks greatly and causes high energy consumption, which greatly increases the production cost; at the same time, the metal oxide It will absorb oxygen and form a depletion layer on the surface. When ultraviolet light is applied, the oxygen ions must be desorbed first, thus reducing the photoresponse speed of the ultraviolet detector. Most of the existing processes use purple transparent glass packaging under high vacuum, which is a high-cost process. Complicated, not conducive to mass adoption

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  • Metal oxide ultraviolet detector and production method thereof
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  • Metal oxide ultraviolet detector and production method thereof

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Embodiment 1

[0040] Such as figure 1 Shown: the interdigitated electrode 2 is made of gold with a thickness of 50nm, the metal oxide nanoparticles are made of zinc acetate dihydrate precursor, and its mixed layer with shellac is made of zinc oxide nanoparticles and shellac, with a thickness of 2000nm, wherein the weight ratio of zinc oxide nanoparticles to shellac is 1:1, and the diameter of zinc oxide nanoparticles is 20nm.

[0041] The preparation method is as follows:

[0042] ① Thoroughly clean the quartz glass substrate first, then dry it after cleaning;

[0043] ② Vacuum thermal evaporation of interdigitated electrodes on the surface of the quartz glass substrate;

[0044]③ Coating a mixed layer of metal oxide nanoparticles and shellac on the interdigitated electrodes;

[0045] ④Heat the device to 150°C to make the shellac in a fluid state, anneal in an ethanol atmosphere, and the annealing time is 2h;

[0046] ⑤After the annealing is completed, raise the temperature to the curin...

Embodiment 2

[0048] Such as figure 1 Shown: the preparation material of the interdigital electrode 2 is gold, the thickness is 50nm, the metal oxide particles are made of zinc acetate dihydrate, and its mixed layer with shellac is made of zinc oxide nanoparticles and shellac, and the thickness is 2000nm , wherein the weight ratio of zinc oxide nanoparticles to shellac is 1:1, and the diameter of zinc oxide nanoparticles is 5nm.

[0049] The preparation method is as follows:

[0050] ① Thoroughly clean the quartz glass substrate first, then dry it after cleaning;

[0051] ② Vacuum thermal evaporation of interdigitated electrodes on the surface of the quartz glass substrate;

[0052] ③ Coating a mixed layer of metal oxide nanoparticles and shellac on the interdigitated electrodes;

[0053] ④ Heat the device to 150°C to make the shellac in a fluid state, anneal in an ethanol atmosphere, and the annealing time is 0.5h;

[0054] ⑤After the annealing is completed, raise the temperature to th...

Embodiment 3

[0056] Such as figure 1 Shown: the preparation material of the interdigital electrode 2 is gold, the thickness is 20nm, the metal oxide particles are made of zinc acetate dihydrate precursor, and its mixed layer with shellac is formed by mixing zinc oxide nanoparticles and shellac, with a thickness of 500nm, wherein the weight ratio of zinc oxide nanoparticles to shellac is 1:10, and the diameter of zinc oxide nanoparticles is 5nm.

[0057] The preparation method is as follows:

[0058] ① Thoroughly clean the quartz glass substrate first, then dry it after cleaning;

[0059] ② Vacuum thermal evaporation of interdigitated electrodes on the surface of the quartz glass substrate;

[0060] ③ Coating a mixed layer of metal oxide nanoparticles and shellac on the interdigitated electrodes;

[0061] ④ Heat the device to 150°C to make the shellac in a fluid state, anneal in an ethanol atmosphere, and the annealing time is 0.5h;

[0062] ⑤After the annealing is completed, raise the ...

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Abstract

The invention discloses a metal oxide ultraviolet detector and a production method thereof, belongs to the field of optical detectors and solves the problems that due to structure and material reasons of a detection layer, the prior metal oxide ultraviolet detector has high requirement on the production environment, is low in sensitivity and is high in production cost. The metal oxide ultraviolet detector comprises a quartz glass substrate, interdigital electrodes, metal oxide nano-particles and a shellac mixed layer. The production method includes: mixing metal oxide precursor and shellac into mixed solution, coating the quartz glass substrate which the interdigital electrodes are sputtered to, through the mixed solution, after heating and pretreatment, subjecting thin film to solvent annealing with high-concentration ethanol vapor, allowing the shellac in the mixed thin film to rise to the top of the film, subjecting metal elements in the mixed thin film and hydroxyl in the shellac to coordination to convert the metal oxide precursor into metal oxide nano-particles at low temperature, and forming a pointed cone structure by natural stacking; finally, according to the unique thermal polymerization characteristic of the shellac, continuously heating the shellac to solidification, thereby packaging the detection layer of the detector in situ.

Description

technical field [0001] The invention belongs to the technical field of sensor preparation, in particular to a metal oxide ultraviolet detector. Background technique [0002] UV detectors can be used in scientific research, military, space, environmental protection and many other industrial fields. For example, in space, it can be used as a detector of solar ultraviolet light in the orbit of a spacecraft; in terms of environmental protection, with the destruction of the atmospheric ozone layer, the monitoring of solar ultraviolet light is becoming more and more important; industrially, ultraviolet light detectors can be used as waste gas and Monitors for automobile exhaust and flame detectors in machine building and other thermal contexts, etc. It also has important military applications, such as in missile guidance and missile early warning and defense systems. Therefore, the development of ultraviolet detectors has important theoretical and practical significance. [000...

Claims

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Application Information

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IPC IPC(8): H01L31/09H01L31/18H01L31/0203
CPCH01L31/09H01L31/18Y02P70/50
Inventor 于军胜韩世蛟王煦范惠东
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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