Zirconia and alumina gradient composite coat and production method thereof
A composite coating and zirconia technology, which is applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of application limitation, glass embrittlement, cracking, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment 1
[0017] A zirconia / alumina gradient composite coating was deposited on 316 stainless steel by metal-organic chemical vapor deposition. 316 stainless steel was ultrasonically cleaned with acetone, alcohol and deionized water, and placed in the reaction chamber. Zirconium acetylacetonate and aluminum acetylacetonate were used as metal precursors, Ar was used as carrier gas, O 2 as a reactive gas. The volatilization temperature of zirconium acetylacetonate is 180° C., and the flow rate of Ar carrier gas passing through zirconium acetylacetonate is 30 sccm. The volatilization temperature of aluminum acetylacetonate is 120° C., and the flow rate of Ar carrier gas passing through aluminum acetylacetonate is 10 sccm. o 2 The flow rate is 10 sccm, the deposition temperature is 500° C., the deposition time is 0.5 hour, and the pressure of the reaction chamber is 1200 Pa.
[0018] By changing the volatilization temperature of zirconium acetylacetonate and aluminum acetylacetonate and...
Embodiment 2
[0021] Zirconia / alumina gradient composite coatings were deposited on 304 stainless steel by DC reactive magnetron co-sputtering. Independent metal zirconium and aluminum are used as target materials, and independent DC power supplies are used for power supply, Ar is used as the glow gas, and O 2 as a reactive gas. 304 stainless steel is ultrasonically cleaned with acetone, alcohol and deionized water, and then put into the vacuum chamber. When the back vacuum is better than 2×10 -3 After Pa, clean with Ar plasma bombardment for 15 min in the sputtering chamber. Control Ar / O 2 =120 / 30 (flow ratio), total pressure 0.4Pa, target-base distance 100mm, base bias voltage -80V. Multilayer gradient composite coatings with different composition ratios were obtained by adjusting the sputtering power and deposition time of the zirconium and aluminum targets. The sputtering power of the zirconium target and the aluminum target was 3200W and 6000W, respectively, for 20min. Then adjus...
Embodiment 3
[0024]Zirconia / alumina gradient composite coatings were deposited on 304 stainless steel by radio frequency reactive magnetron sputtering. Independent metal zirconium / yttrium alloy (the content of Y is 18wt%), aluminum as the target material, using independent radio frequency power supply for power supply, Ar as the starting gas, O 2 as a reactive gas. 304 stainless steel is ultrasonically cleaned with acetone, alcohol and deionized water, and then put into the vacuum chamber. When the back vacuum is better than 7×10 -3 After Pa, the substrate was cleaned by Ar plasma bombardment for 15 min in the sputtering chamber. Control Ar / O 2 =50 / 20 (flow ratio), the total pressure is 1.5Pa, the target-base distance is 50mm, and the base bias is -80V. Multilayer gradient composite coatings with different composition ratios were obtained by adjusting the sputtering power of the zirconium / yttrium alloy target and the aluminum target. The sputtering power of the zirconium target and th...
PUM
Property | Measurement | Unit |
---|---|---|
Thickness | aaaaa | aaaaa |
Thickness | aaaaa | aaaaa |
Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com