Preparing method of superhydrophobic concave angle T-shaped microcolumn structure

Abstract

The invention discloses a preparing method of a superhydrophobic concave angle T-shaped microcolumn structure. The method comprises the steps of (a), rotationally coating photoresist on one surface of a chip and executing developing operation to obtain a first round hole array; (b), depositing an adhesion layer and a seed layer on the surface of the photoresist in sequence; (c) rotationally coating the photoresist on the surface of the seed layer and executing the developing operation to obtain a second round hole array; (d), performing plating and filling on the first round hole array and the second round hole array to obtain a metal T-shaped microcolumn structure; (e) removing the photoresist and surplus adhesion layer and seed layer; (f), depositing a protection layer on the surface of the T-shaped microcolumn; (g), removing a lateral extending part of the microcolumn T-shaped structure and remaining a columnar structure and the protection layer to obtain one concave angle T-shaped microcolumn structure. According to the method, a target structure of different sizes can be prepared controllably, a process window is wide, the repeatability is good, the chemical stability is high, and the superhydrophobic concave angle T-shaped microcolumn structure has excellent superhydrophobic performance and self-cleaning capacity.

Description

technical field [0001] The invention belongs to the field of micro-nano manufacturing, and more specifically relates to a method for preparing a super-hydrophobic concave-angle T-shaped micro-column structure. Background technique [0002] Superhydrophobic surface (the apparent contact angle of water droplets on the surface is greater than 150°, and the contact angle hysteresis is less than 10°) due to its unique anti-moisture, low adhesion and self-cleaning properties, in microfluidic systems, non-destructive liquid transport, micro Nano-electromechanical systems have great application prospects in the field of low-adhesion functional surfaces and biocompatibility. At present, superhydrophobic surfaces are generally obtained by processing microscopic rough structures on the surface of materials and coating hydrophobic materials. On a rough surface, the contact state between the droplet and the rough structure determines the wettability of the surface. When the droplet is ...

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Problems solved by technology

[0003] However for figure 1 (c) The preparation method of the structure shown in the prior art is very complicated, requiring repeated use of thermal silicon oxide coating, inductively coupled plasma etching, wet silicon etching, etc., and the equipment involved is very expensive. The cost is high, while the process is difficult and the controllability is poor, so it is urgent to develop a process method with low cost and high controllability

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