Preparation method for ultrathin up-right graphene field emission cathode rich in wrinkle on surface
A technology that emits cathodes and graphene, applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve problems such as increasing graphene surface, reducing turn-on and threshold fields, and large gaps
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Embodiment 1
[0033] (1) Preparation of silicon substrate:
[0034] First cut the silicon wafer into small pieces of 2cm×2cm, ultrasonically clean it in acetone, absolute ethanol, and deionized water for about 10 minutes, and the ultrasonic power is 50W, and then immerse the silicon wafer in hydrofluoric acid with a volume ratio of 4% for 5 minutes. In minutes, a silicon wafer substrate that is clean, pollution-free and free of surface oxide is obtained.
[0035] (2) Growing upright graphene:
[0036] The growth of vertical graphene is completed in a radio frequency sputtering device, and the schematic diagram of the device is shown in figure 1 shown. Place the prepared silicon substrate on the sample stage in the reaction chamber, and evacuate the reaction chamber to about 8 × 10 -4 Pa; then pass high-purity hydrogen (5N) into the reaction chamber, adjust the pressure of the reaction chamber to 300Pa; heat the substrate to 1100K at a speed of about 60K / min; after the temperature and pre...
Embodiment 2
[0042] (1) Preparation of silicon substrate:
[0043] First cut the silicon wafer into small pieces of 2cm×2cm, ultrasonically clean it in acetone, absolute ethanol, and deionized water for about 10 minutes, and the ultrasonic power is 50W, and then immerse the silicon wafer in hydrofluoric acid with a volume ratio of 4% for 5 minutes. In minutes, a silicon wafer substrate that is clean, pollution-free and free of surface oxide is obtained.
[0044] (2) Growing upright graphene:
[0045] The growth of vertical graphene is completed in a radio frequency sputtering device, and the schematic diagram of the device is shown in figure 1 shown. Place the prepared silicon substrate on the sample stage in the reaction chamber, and evacuate the reaction chamber to about 8 × 10 -4 Pa; then pass high-purity hydrogen (5N) into the reaction chamber, adjust the pressure of the reaction chamber to 280Pa; heat the substrate to 1100K at a speed of about 60K / min; after the temperature and pre...
Embodiment 3
[0051] (1) Preparation of silicon substrate:
[0052] First cut the silicon wafer into small pieces of 2cm×2cm, ultrasonically clean it in acetone, absolute ethanol, and deionized water for about 10 minutes, and the ultrasonic power is 50W, and then immerse the silicon wafer in hydrofluoric acid with a volume ratio of 4% for 5 minutes. In minutes, a silicon wafer substrate that is clean, pollution-free and free of surface oxide is obtained.
[0053] (2) Growing upright graphene:
[0054] The growth of vertical graphene is completed in a radio frequency sputtering device (commercially available), and the schematic diagram of the device is shown in figure 1 shown. Place the prepared silicon substrate on the sample stage in the reaction chamber, and evacuate the reaction chamber to about 8 × 10 -4 Pa; then pass high-purity hydrogen (5N) into the reaction chamber, adjust the pressure of the reaction chamber to 320Pa; heat the substrate to 1100K at a speed of about 60K / min; afte...
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