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System and method of multi-element pulsed laser deposition for synthesizing composite material in batches

A technology of pulsed laser deposition and composite materials, which is applied in the field of materials science, can solve problems such as uneven growth rate, inconsistent film thickness, mask dislocation process, etc., and achieve the effects of rapid screening test, improved efficiency, and convenient use

Inactive Publication Date: 2015-05-06
SHENZHEN ARRAYED MATERIALS TECH CO LTD
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  • Abstract
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  • Application Information

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Problems solved by technology

It brings a series of problems, such as phase separation, mask misalignment and process complexity, etc.
These problems have not been solved, and gradually become the fundamental problems of this method
[0007] However, pulsed laser deposition has a very prominent shortcoming, that is, the inhomogeneity of the growth rate, that is, the film thickness will be inconsistent everywhere on the substrate (Tyunina, et al., Journal of Vacuum Science & Technology A 16:2381 (1998))
However, in this invention, the non-uniform growth rate of pulsed laser deposition is used to synthesize the material, so that the composition of each point on the substrate is different

Method used

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  • System and method of multi-element pulsed laser deposition for synthesizing composite material in batches
  • System and method of multi-element pulsed laser deposition for synthesizing composite material in batches
  • System and method of multi-element pulsed laser deposition for synthesizing composite material in batches

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Embodiment Construction

[0054] The following will combine Figure 2-Figure 4 The present invention is described in further detail with specific examples. The invention is not limited to the examples described here, since the invention likewise permits other equally effective applications.

[0055] figure 2 It is a blueprint of multi-pulsed laser deposition system. A high-energy laser 1 such as a Lambda Physik LPX 210i emits a high-energy laser beam 2 . The laser beam splitting device comprises two laser beam splitters (for example, the first beam splitter 3 has a reflectivity of 30%, a transmittance of 70%; the second beam splitter 4 has a reflectivity of 50%, a transmittance of 50%) and A mirror 5. The laser beam is split into three laser beams (first laser beam 6, second laser beam 7 and third laser beam 8). The first beamsplitter 3, the second beamsplitter 4 and the reflector 5 are arranged in series along the path of the laser beam, and the first beamsplitter 3, the second beamsplitter 4 an...

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Abstract

The invention discloses a system and method of multi-element pulsed laser deposition for synthesizing a composite material in batches in the field of materials science. The method comprises the following steps of: using several beams of high energy laser, focusing the high energy laser beams and evaporating different source material targets by the focused high energy laser to generate different laser plasma beams, and finally depositing the source material unevenly on a substrate. The system and the method provided by the invention are simple and easy to use and have the characteristics of low cost, high efficiency, strong coordination and so on. The system and the method can be used for large-batch material synthesis in novel material research.

Description

technical field [0001] The invention relates to a method and instrument design for batch synthesis of a series of different materials on a substrate in the field of materials science, in particular to a multi-element pulse laser deposition system and method for batch synthesis of composite materials. Batch synthesis of a series of different materials is very important in the development of new materials, and the invention can greatly improve the efficiency of material preparation and testing. Background technique [0002] At present, there is a very large hotspot in the field of materials science focusing on the research of composite materials, such as the solar material CuIn x Ga 1-x Se 2 (Repins, et al., Progress in Photovoltaics 16:235 (2008); Contreras, et al., Progress in Photovoltaics 7:311 (1999)) or CuIn 1-x Ga x Se 2-y S y (Ennaoui, et al., Solar Energy Materials and Solar Cells67:31(2001)) and the high temperature superconductor material Ca(Fe 1-x co x ) 2...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/28
CPCC23C14/28C23C14/0021C23C14/042
Inventor 张晓军
Owner SHENZHEN ARRAYED MATERIALS TECH CO LTD
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