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Super capacitor based on three-dimensional ZnO@MnO2 composite nano array interdigital electrode and manufacturing method thereof

A technology of supercapacitors and interdigitated electrodes, which is applied in the field of energy storage, can solve the problems that it is difficult to adapt to the development requirements of high-power and high-energy flexible transparent supercapacitors, it is difficult to apply solid-state electronic devices, and the capacitors are low, so as to meet the requirements of high-power , meet the charging and discharging needs, long life effect

Active Publication Date: 2015-03-25
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Using this technology to prepare interdigitated electrodes on a flexible transparent substrate is a very effective way to process transparent electronic devices. For example, patent document CN 201210579735.5 discloses a transparent and flexible electrochemical device based on a planar comb-shaped electrode structure and its The preparation method uses an interdigitated electrode to prepare an electric double layer transparent supercapacitor with a one-dimensional carbon film material as an electrode. However, the specific capacitance of the capacitor is very low, and it uses a liquid electrolyte, which has poor safety, is not easy to package, and is difficult to apply Solid-state electronic devices are difficult to adapt to the development requirements of high-power, high-energy flexible transparent supercapacitors

Method used

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  • Super capacitor based on three-dimensional ZnO@MnO2 composite nano array interdigital electrode and manufacturing method thereof
  • Super capacitor based on three-dimensional ZnO@MnO2 composite nano array interdigital electrode and manufacturing method thereof
  • Super capacitor based on three-dimensional ZnO@MnO2 composite nano array interdigital electrode and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Preparation of ZnOMnO 2 Composite nanoarray interdigitated electrodes

[0046] 1. Substrate selection: choose PET as the substrate, and treat it with an oxygen plasma surface treatment machine for 2 minutes.

[0047] 2. Design of interdigitated electrodes: use semiconductor device micro-processing technology to process interdigitated electrode patterns on PET substrates. The pattern design of the interdigitated electrode used as a UV lithography mask is as follows: figure 1 shown. It can be seen from the figure that the number of pairs of prepared interdigital electrodes is 8 pairs, and the spacing and finger width between the interdigital electrodes are 100 microns. The operating conditions of the photolithography process are: the photoresist model used for ultraviolet lithography is AZ4620, the coating thickness is 3 microns, the coating speed is 2000 rpm, the pre-baking temperature is 105 degrees, the exposure time is 25s, and the developing time For 70s, an inte...

Embodiment 2

[0053] Fabrication of flexible transparent solid-state 3D supercapacitors

[0054] Dissolve lithium chloride and PVA in an appropriate amount of deionized water at a mass ratio of 2:1, and stir in a water bath at 85°C for 1 hour to obtain a solid electrolyte. Spread the solid electrolyte evenly on the prepared interdigitated capacitor and encapsulate it with PMMA to obtain a flexible transparent solid supercapacitor, such as Figure 4 As shown, it can be seen from the figure that the solid supercapacitor has a length of about 5 cm, high transparency, can be bent, and has good flexibility. The cyclic voltammetry curves of the prepared flexible transparent solid supercapacitor are as follows: Figure 5 As shown, it can be seen from the figure that at different scan rates, the CV curves have a nearly rectangular structure, which is a typical amorphous MnO 2 Capacitive characteristics, at a scan rate of 2mV / s, the area capacitance of the device can reach 167mF / cm -2 . Figure ...

Embodiment 3

[0056] Preparation of ZnOMnO 2 Composite Nanoarray Interdigitated Electrodes

[0057] 1. Substrate selection: select PDMS as the substrate, and treat it with an oxygen plasma surface treatment machine for 2 minutes.

[0058] 2. Design of interdigitated electrodes: use semiconductor device micromachining technology to process interdigitated electrode patterns on PDMS substrates. The pitch and finger width of the interdigitated electrodes used as a UV lithography mask are 2 μm. The operating conditions of the photolithography process are: the photoresist model used for ultraviolet lithography is AZ4620, the coating thickness is 4 microns, the coating speed is 1000 rpm, the pre-baking temperature is 80 degrees, the exposure time is 15s, and the developing time For 65s, an interdigitated electrode pattern was prepared on the PDMS substrate.

[0059] 3. Preparation of collector electrode and ZnO seed layer: a 60nm Pt thin film and a 10nm ZnO thin film were deposited on the PDMS ...

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Abstract

The invention relates to a super capacitor based on a three-dimensional ZnO@MnO2 composite nano array interdigital electrode and a manufacturing method of the super capacitor. The super capacitor comprises a packaging bag and a solid electrolyte, and further comprises the ZnO@MnO2 composite nano array interdigital electrode, the solid electrolyte and the ZnO@MnO2 composite nano array interdigital electrode are arranged in the packaging bag, and the ZnO@MnO2 composite nano array interdigital electrode is smeared with the solid electrolyte. The micro-nano machining technology is adopted in the ZnO@MnO2 composite nano array interdigital electrode, a transparent interdigital collector electrode is manufactured on a flexible and transparent PET substrate, a three-dimensional ZnO bar nano array is grown on the collector electrode through a solution method, and three-dimensional ZnO bars are coated with a layer of MnO2 based on an electro-deposition technology. According to the super capacitor, the area ratio capacitance of a device is greatly improved, a nano array clearance is adopted as a channel facilitating ion transmission and exchange, and the rate capacity and circulating performance of the capacitor are improved.

Description

technical field [0001] The invention relates to the field of energy storage technology, in particular to a three-dimensional ZnOMnO-based 2 A supercapacitor with composite nano-array interdigitated electrodes and a preparation method thereof. Background technique [0002] With the continuous development of wearable and portable multimedia electronic devices, higher requirements are placed on flexible and transparent electronic devices. For example, in order to realize the commercialization of flexible display devices with ultra-thin screens, their power supply components also need to be flexible. and transparency. Commonly used devices that provide energy storage are mainly lithium batteries and supercapacitors. As a new type of electrical energy storage device, supercapacitors are widely used due to their higher energy density than traditional parallel plate capacitors, higher power density and longer life than lithium-ion batteries. Research. [0003] Supercapacitors a...

Claims

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Application Information

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IPC IPC(8): H01G11/26H01G11/46H01G11/84H01G11/86
CPCH01G11/00H01G11/26H01G11/46H01G11/84H01G11/86Y02E60/13
Inventor 李晓军赵勇刘颖江鹏褚卫国赵修臣
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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