A light-emitting diode epitaxial structure doped with high concentration te
A technology of light-emitting diodes and epitaxial structures, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of poor crystal quality of epitaxial layers, limited physical and chemical properties, and small amount of Te impurity, etc., to improve the crystal quality. quality, improve luminous efficiency, improve the effect of incorporating efficiency
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[0053] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0054] refer to figure 1 As shown in the present invention, a high-concentration Te-doped light-emitting diode epitaxial structure disclosed by the present invention forms a buffer layer 2, an corrosion barrier layer 3, a roughening layer 4, a first-type current spreading layer 5, and a second-type current spreading layer on a substrate 1, respectively. The first-type confinement layer 6 , the active layer 7 , the second-type confinement layer 8 , and the second-type current spreading layer 9 . Wherein, the first-type current spreading layer 5 is composed of 4 layers and a superlattice sandwiched between the layers.
[0055] Wherein, the substrate 1 is a GaAs substrate with a thickness of 270 μm. The material of the buffer layer 2 is GaAs III-V compound, and the thickness of the buffer layer 2 is 600nm. Corrosion barrier layer 3 is made up...
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