Testing structures and testing method for three-port RF devices

Abstract

The invention discloses testing structures for three-port RF devices. The testing structures comprise the first testing structure, the second testing structure and the third testing structure. The tested devices in the three testing structures are identical, sequentially, one port of each device is connected with a resistor in series, and other two ports of each device are connected with G-S-G testing ports; for the resistors connected in series to the first testing structure, the second testing structure and the third testing structure, resistance testing structure sets are arranged respectively, and each resistance testing structure set comprises the fourth testing structure, the fifth testing structure, the sixth testing structure and the seventh testing structure. Each fourth testing structure comprises a tested resistor, and two ports of each tested resistor are connected with the G-S-G testing ports. Each fifth testing structure is an open de-embedding structure of the corresponding fourth testing structure. Each sixth testing structure and each seventh testing structure are a first through de-embedding structure and a second through de-embedding structure of the corresponding fourth testing structure. The invention further discloses a testing method for the three-port RF devices. As RF parameter testing of the three-port RF devices can be achieved through a two-port network analyzer, testing cost can be greatly lowered, and testing efficiency can be improved.

Description

technical field [0001] The invention relates to the manufacturing field of semiconductor integrated circuits, in particular to a test structure of a three-port radio frequency device; the invention also relates to a test method of a three-port radio frequency device. Background technique [0002] In semiconductor integrated circuits integrated with radio frequency devices, three-port radio frequency devices are commonly used devices, such as transistors, transformers, and radio frequency resistors. The radio frequency parametric model of the radio frequency device carries out the design of the semiconductor integrated circuit integrated with the radio frequency device. In order to obtain the radio frequency parameters of the three-port radio frequency device, the prior art generally needs to use a three-port or four-port network analyzer for testing, such as figure 1 As shown, it is a schematic diagram of the test structure of the existing three-port radio frequency device....

AI Technical Summary

Problems solved by technology

[0004] However, the price of three-port or four-port network analyzers is very expensive, while the price of two-port network analyzers is cheap and the technology is mature and popular. Many companies are equipped with two-port network analyzers, but three-port or four-port Network analyzers are not equipped or equipped with less

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