Wave aberration measuring device
A measuring device and a technology for wave aberration, which are applied in photoplate-making process exposure devices, optical performance testing, microlithography exposure equipment, etc. Signal strength, enhanced compactness, reduced requirements
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Embodiment 1
[0027] Such as figure 2 As shown, the wave aberration measurement device of the present invention includes two parts: an object plane mask 13 and an image plane detection unit 19 . On the object plane mask 13, small hole marks are included, and the small hole marks can be circular or square, such as image 3 As shown, the size of the small hole mark can be taken as 700nm. The image plane detection unit 19 includes a substrate 15 and a detector 18 . The upper surface of the substrate 15 includes grating marks 16, the line width of the grating marks is 600nm, and the period is 1200nm. The substrate can be made of fused silica glass, and the thickness of the substrate can be 6.35 mm. The lower surface of the base 15 contains the window marked 1.5 mm. The lower surface of the substrate 15 coincides with the best focus plane of the projection objective. The structure of the grating mark 16 is as Figure 4 As shown, there are marks in two directions, and the two marks are per...
Embodiment 2
[0035] In another embodiment of the present invention, the structure of the grating mark 16 on the substrate 15 is as Figure 6 As shown, it is a two-dimensional grating. Each marking period includes two light-transmitting regions and two light-transmitting regions, wherein the marking line widths of the light-transmitting region and the light-impermeable region are equal. During the marking period, the difference in optical path between the light beams passing through the light-transmitting area 1 and the light-transmitting area 2 is 180 degrees.
[0036] During measurement, the light emitted by the light source 11 is incident on the object plane mask 13 on the mask table 14 after passing through the illumination system 12, and the small holes of the object plane mask 13 diffract the beam to form an ideal spherical wave. After passing through the projection objective lens, a spherical wave carrying the wave aberration of the projection objective lens is formed. The spherica...
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