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Perfluoride Treatment Unit

A perfluorinated compound and treatment device technology, applied in perfluorocarbon/hydrofluorocarbon capture, chemical instruments and methods, greenhouse gas capture, etc., can solve problems such as long-term continuous situations

Active Publication Date: 2016-07-06
株式会社力森诺科
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

And, as mentioned above, perfluorinated compounds are generally relatively stable, and their effects last for a long time in many cases.

Method used

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Embodiment Construction

[0034] Hereinafter, modes for carrying out the present invention will be described in detail. In addition, this invention is not limited to the following embodiment, Various deformation|transformation can be implemented within the range of the summary. In addition, the drawings used are for explaining this embodiment, and do not show actual size.

[0035]

[0036] figure 1 It is a figure explaining the overall structure of the semiconductor manufacturing plant to which the perfluoride processing apparatus of this embodiment is applied.

[0037] As shown in the figure, the semiconductor manufacturing plant of this embodiment includes a semiconductor manufacturing facility 1 for manufacturing semiconductors, a perfluoride treatment device 2 for decomposing and treating perfluoride, and an acid scrubber 3 for collecting acid gas.

[0038] Semiconductor manufacturing equipment 1 is usually a clean room, and in the illustrated example, it is equipped with: a P-Si etcher 11 for ...

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PUM

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Abstract

The present invention provides a perfluoride treatment device and the like capable of more reliably removing acid components from decomposed gas and more smoothly replacing chemical agents for dry removal of acid components. A perfluoride treatment device, characterized in that it includes: a heating unit, which heats gas and water containing perfluoride, and uses a catalyst to hydrolyze the perfluoride to generate decomposition gas; it is arranged at the front and rear of the heating unit The heat exchange unit of the section; and the acid component removal unit for dry removal of the acid component in the decomposition gas. The acid component removal unit is equipped with a gate at the bottom of the device that can be opened and closed, and takes out the reacted chemical when it is opened. (251a-251e) (gate (251)); and the slit portion (252), which is arranged between the gates (251), has slopes (S1, S2) facing the gate (251) from above, and on the slope ( S1 , S2 ) have slits ( 252 a ) of a size that allow decomposition gas to pass through but not medicine to pass through.

Description

technical field [0001] The present invention relates to, for example, a perfluoride treatment device used for decomposing and treating perfluoride. Background technique [0002] For example, in the manufacturing process of a semiconductor device or a liquid crystal device, etching and cleaning may be performed in order to form a fine pattern. In this case, perfluorinated compounds are often used. In addition, perfluorinated compounds are generally stable and mostly harmless to the human body, so they are also used, for example, as refrigerants in air conditioners. [0003] However, among these perfluorinated compounds, when released into the atmosphere, many perfluorinated compounds have a large impact on the global environment. That is, since it exists stably in the atmosphere for a long period of time and has a large global warming coefficient, it becomes a factor of global warming. In addition, as described above, perfluorinated compounds are generally relatively stabl...

Claims

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Application Information

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IPC IPC(8): B01D53/68B01D53/75
CPCY02C20/30
Inventor 鸟巢纯一早坂裕二加藤健一
Owner 株式会社力森诺科
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