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Electric pump gallium nitride micro laser capable of achieving single-direction emission and preparation method thereof

A micro-laser, unidirectional technology, applied in the laser field, can solve the problems of no closed laser resonance, large optical loss, and no laser resonance, and achieve the effect of reducing optical loss, low loss, and high optical gain.

Inactive Publication Date: 2014-08-27
NANJING UNIV OF POSTS & TELECOMM
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Problems solved by technology

However, due to the existence of the gap in this spiral microcavity, the counterclockwise resonant mode propagates along the edge and then transmits out, which cannot form a closed laser resonance, and only the clockwise resonant mode exists inside the microcavity.
Therefore, although the spiral microcavity can obtain laser light emitted in one direction, the light field mode that can be emitted does not form a closed laser resonance, resulting in a large optical loss.

Method used

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  • Electric pump gallium nitride micro laser capable of achieving single-direction emission and preparation method thereof
  • Electric pump gallium nitride micro laser capable of achieving single-direction emission and preparation method thereof
  • Electric pump gallium nitride micro laser capable of achieving single-direction emission and preparation method thereof

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Embodiment Construction

[0035] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0036] (Taking the preparation of a circular + cone cavity structure as an example, the diameter of the disc is 20 microns)

[0037] Step 1: Clean the purchased commercial GaN wafer on silicon substrate ultrasonically in sequence with acetone, absolute ethanol and deionized water, then dry it with nitrogen gas, and use a homogenizer on the front side of the wafer (p-type GaN layer) 4 Upper surface) Spin-coat photoresist AZ5214 at a speed of 4000 rpm for 40 seconds (the thickness of the photoresist is 1.5 microns);

[0038] Using optical lithography technology, the asymmetric thin-film microcavity structure supported by cantilever beams is defined on the front side of the wafer (GaN surface). The lithography machine model is MA6, and the microcavity cross-sectional shape is as follows figure 1 As shown, it is a cantilever beam (IV) c...

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Abstract

The invention discloses an electric pump gallium nitride micro laser capable of achieving single-direction emission and a preparation method of the electric pump gallium nitride micro laser. The method comprises the steps of firstly utilizing silicon-based p-type gallium nitride / quantum well / n-type gallium nitride materials, utilizing the electron beam etching technology and the deep-silicon etching technology for preparing an asymmetric gallium nitride suspension thin film micro-cavity supported by a single cantilever beam, conducting vapor deposition of an Au / Ni electrode on the front face of a wafer, conducting vapor deposition of Au / Ti on the surface of the n-type gallium nitride, adopting the ultrasonic bonding technology, bonding a lead on the surface of the electrode, and finally preparing the complete laser. According to the electric pump gallium nitride micro laser and the preparation method of the electric pump gallium nitride micro laser, a proper current is exerted on the prepared laser, and whispering gallery mode ultraviolet laser with single-direction emission is obtained.

Description

[0001] Technical field [0002] The present invention is a laser technology field involving a P -type nitride / quantum trap / N -type nitride asymmetric micro -cavity laser and its preparation method. [0003] Background technique [0004] UV lasers can be divided into three categories according to the structure of the cavity: the first category is a random laser formed by random resonance on the nano -granular interface; the second category is two -dimensional micro -nano -structures.The end surface is the F-P laser generated by a laparoscopic resonance.The former scattered loss is very large and there is no fixed mode; the end facial loss of the latter is very large, and it is not easy to obtain high -quality (Q) and low threshold laser.In view of this, micro -cavity such as large -scale micrometers or micron discs using large -scale or micron dishes uses its entire internal reflection of the echo wall mold laser provides people with a way to obtain high -quality laser.Single -cry...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/343H01S5/10
Inventor 朱刚毅王永进李欣施政
Owner NANJING UNIV OF POSTS & TELECOMM
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