Method of performing glass surface metallization by utilization of plasma technology

Abstract

A method of performing glass surface metallization by utilization of a plasma technology is disclosed. Direct-current arc laminar plasma beams adopting Ar and N2 as working gases are adopted as a heat source. Two intermediate coatings are successively sprayed onto the surfaces of a glass substrate and firmly combined to the glass. By adoption of the method of performing glass surface metallization, large-scale mass production in the atmospheric environment can be achieved, the production efficiency is high, and the powder material utilization rate is high. The produced metallization coatings largely adjust the coefficient of linear expansion of sealing joints so that the sealing joints and metals with a unmatched coefficient of linear expansion can be subjected to metal solder braze welding, the joints are firm and reliable and good in gas tightness.

Description

technical field [0001] The patent of the present invention relates to a glass surface metallization process for glass-metal sealing technology, specifically a method of using plasma technology for glass surface metallization. The invention belongs to the technical field of vacuum device material connection, especially the field of high-temperature solar vacuum heat collecting tube production. Background technique [0002] Solar energy is an inexhaustible green energy, which can be effectively collected by vacuum heat collecting tubes. At present, the vacuum heat collection tube usually uses a glass tube with a metal heat absorber inside. The vacuum technology is used to make the glass tube in a vacuum state, thereby minimizing the loss of heat energy, but at least one end of the metal heat absorber protrudes from the glass tube. The outer end is connected to the devices required for heat energy, such as water tanks, connecting pipes, etc. Therefore, the sealing technology ...

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Problems solved by technology

Secondly, the Kovar alloy used for sealing needs to be pre-oxidized, and the thickness of the oxide film should be controlled within a certain range. The strength decreases; if the oxide film is too thick, the metal surface oxide will be rough and loose, and the sealing parts will easily leak air, and the process is more difficult

In addition, because the sealing technology needs to use high temperature, it is difficult to adjust the welding temperature, the energy consumption is large, the process repeatability is poor, and the metal parts are easy to be oxidized at high temperature

In order to solve the above problems, the glass surface is usually metallized, and then the metal solder is placed between the metallized part of the glass and the sealing metal to heat and melt, and the glass and the metal are firmly sealed together. The linear expansion coefficient of the joint has been adjusted to avoid the thermal stress problem of non-matching sealing. At the same time, the metal does not need to be pre-oxidized. It only needs to be electroplated with Ni to improve solder wetting. Therefore, the process is simple and reliable, but the traditional Glass metallization adopts the low-temperature evaporation sputtering method. The disadvantage of this method is that the efficiency is very low, and it has high requirements on equipment and environment, and it needs to be implemented in a vacuum environment.

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