Rectangular-hole single-stage diffraction grating

Abstract

The invention provides a rectangular-hole single-stage diffraction grating. The grating is formed by repeatedly arranging regular light-pervious rectangular hole modules on a light-impervious substrate periodically in the two-dimensional direction, the length-width ratio of each module rectangular hole of the grating is 3:2, the long edge of each rectangular hole and the one-dimensional axis direction form an included angle of 45 degrees, and the proportion of the distance between diagonal line intersection points of every two adjacent rectangular holes in the same dimension to the length of the long edge of each rectangular hole is shown in the instruction. Compared with an existing grating, the single-stage diffraction grating can effectively inhibit high-level diffraction, 2n-level and 3n-level diffraction can be eliminated, n is an integer except zero, and five-level and higher-level diffraction can be inhibited to be 0.16% or lower than 0.16% of first-level diffraction. The single-stage diffraction grating can achieve self-supporting, has higher diffraction efficiency and has a binaryzation feature; the regular rectangular hole modules are arranged in order, and accordingly the grating is easy to manufacture and popularize and use in practice.

Description

Technical field [0001] The present invention involves the diffraction grating field, which specifically involves a single -level diffraction grating in a two -dimensional rules composed of rectangular holes. Background technique [0002] The grating has been widely used in various fields such as physics, astronomy, chemistry, and biology since the discovery of the 1980s.Everyone mainly uses the grating as the core component of the spectrometer to obtain the spectrum, or the application of the grating as the core component of the monochrome to obtain a monochrome beam, so as to further obtain more information. [0003] The existing grating has two major categories: transmission and reflection, and the subdivisions are plane grating and concave grating, equivalent to the barricine and variable -wire rack, shining grating, holographic grating, and multi -layer membrane grating.The internal texture of the crystal is repeatedly arranged in three -dimensional space, so it is a natural ...

AI Technical Summary

Problems solved by technology

[0007] During fabrication and processing, neither the spectral photon sieve nor the quantum lattice grating can be self-supporting, and it is also difficult to realize the application in the vacuum ultraviolet to X-ray band, and the random and discrete distribution of the grating structural elements on the substrate makes the electron beam writing The working efficiency of the equipment is low, and it is difficult to make large-area short-wavelength spectral photon sieves and quantum lattice grating masks

[0008] The "zigzag" grating can be self-supporting. Although the "zigzag" grating can achieve single-order diffraction on the axis of symmetry, there are still many high-level diffraction points with higher brightness in the direction closer to the axis. These high-level diffraction points will Cause some interference in practical application

[0009] In summary, the existing single-stage diffraction gratings have problems such as being unable to achieve self-support, difficult to manufacture, and difficult to realize X-ray band applications.

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