Thermal expansion coefficient adaptation microwave and millimeter wave module integrated structure preparation method
A technology of thermal expansion coefficient and manufacturing method, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of MMIC chip cracking, hidden quality problems, module failure, etc., and achieve the effect of reducing contact potential difference
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[0032] In the design scheme of this patent, the method of adding a buffer sheet is adopted, and a transition layer is added between the MMIC chip and the aluminum alloy shielding cavity. The thermal expansion coefficient of the buffer sheet is between the MMIC chip and the aluminum alloy, but closer to the MMIC chip. In such a structure, the stress caused by the mismatch of thermal expansion coefficients is mainly concentrated at the interface between the aluminum alloy shielding cavity and the buffer sheet. Due to the good thermal expansion coefficient matching between the buffer sheet and the MMIC chip, almost There is no stress, which can greatly improve the reliability of the entire integrated structure.
[0033] The manufacturing process of the integrated structure is: the production of the shielding cavity, the processing of the integrated groove of the buffer sheet, the processing of the buffer sheet, the partial gold plating of the integrated groove of the buffer sheet,...
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