Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method

An array sensor and micro-cantilever technology, applied in the direction of using optical devices to transmit sensing components, can solve the problems of particle motion, detection data errors, and inability to guarantee the consistency of laser beams, to avoid interference, easy to build, and to ensure consistency sexual effect

Inactive Publication Date: 2014-05-28
ANHUI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem with this detection method is that the distance between the beams of the vertical resonator surface-emitting laser is fixed, so it can only detect the micro-cantilever beam array with a certain distance specification, and the relat...

Method used

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  • Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method
  • Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method
  • Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Such as figure 1 As shown, the detection system includes:

[0051] A laser 2 for emitting horizontal laser beams; the laser is fixed on the movable displacement platform 1, and the micro-displacement platform can be displaced in the horizontal and vertical directions; the laser is a semiconductor laser, and the laser light source is a monochromatic laser within the range of 632nm-780nm light source.

[0052] A plane mirror 3, the plane mirror is obliquely arranged in front of the horizontal laser beam, and the horizontal laser beam is reflected into a reflected laser beam directed to the micro-cantilever beam array 5, and the reflected laser beam is used for the free end of the micro-cantilever beam 17 of the micro-cantilever beam array to be measured Scanning; the plane mirror is fixed on the voice coil motor 4, and the voice coil motor is used to make the plane mirror reciprocate horizontally; or it is fixed on the motor shaft 16 of the stepper motor 15, and the step...

Embodiment 2

[0058] Embodiment 2 Micro-cantilever deflection detection method of micro-cantilever array sensor based on plane mirror translation

[0059] The method comprises the steps of:

[0060] 1) Place the micro-cantilever array to be tested on the substrate holding platform in the solvent pool, so that the micro-cantilever array is arranged in an oblique direction. The solvent pool is airtight, with a transparent glass window on the top, and the solvent pool passes through the inlet pipe and The outlet pipe controls the entry and exit of solvent;

[0061] 2) Adjust the initial position of the laser through the movable displacement platform, and adjust the initial position of the plane mirror at the same time, so that the horizontal laser beam emitted by the laser is reflected by the plane mirror and projected vertically to the free end of the micro-cantilever beam of the micro-cantilever beam array through the glass window; Such as figure 1 shown.

[0062] 3) Use the voice coil mo...

Embodiment 3

[0064] Embodiment 3 Micro-cantilever deflection detection method based on the micro-cantilever array sensor rotating by plane mirror

[0065] The method comprises the steps of:

[0066] 1) Place the micro-cantilever array to be tested on the substrate holding platform in the solvent pool, so that the micro-cantilever array is arranged in an oblique direction. The solvent pool is airtight, with a transparent glass window on the top, and the solvent pool passes through the inlet pipe and The outlet pipe controls the entry and exit of solvent;

[0067] 2) Adjust the initial position of the laser through the movable displacement platform, and adjust the initial position of the plane mirror at the same time, so that the horizontal laser beam emitted by the laser is reflected by the plane mirror and projected vertically to the free end of the micro-cantilever beam in the middle of the micro-cantilever beam array through the glass window ;

[0068] 3) Use the stepping motor to driv...

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Abstract

The invention discloses a plane mirror reflection based micro-cantilever deflection detecting system of a micro-cantilever array sensor, which is characterized by comprising a laser device for emitting a horizontal laser beam, a plane mirror, a photoelectric position sensitive detector, a data acquisition card and a computer. According to the deflection detecting system disclosed by the invention, the plane mirror is driven to do corresponding reciprocating translational motion through a voice coil motor or is driven to do reciprocating swinging through a stepping motor, so that the laser beam emitted by the laser device does reciprocating translational motion or rotation to scan a micro-cantilever array; deflection signals of various micro-cantilevers in the micro-cantilever array are received through the photoelectric position sensitive detector in a time sequence so as to monitor real-time response information on the various micro-cantilevers. According to the invention, an array scanning light path is simple in structure and easy to realize; by scanning all the micro-cantilevers by one laser unit, the detecting system can guarantee consistency of irradiation spots on the various micro-cantilevers; the performance of the micro-cantilever array sensor system is improved.

Description

technical field [0001] The invention belongs to the field of multi-point scanning measurement in microsystem equipment, in particular to a micro-cantilever beam deflection detection system and a detection method based on a micro-cantilever beam array sensor reflected by a plane mirror. Background technique [0002] The rapid development of modern science and technology such as measurement, control and automation has greatly promoted the progress of information technology, and human society has entered the information age. As one of the three pillars of information technology and the main means of information acquisition, sensor technology plays an increasingly important role in the development of modern science and technology. Biochemical sensors are an important part of modern sensing technology. It is widely used in scientific research, food safety, medical and health, environmental monitoring, industrial and agricultural production, etc. Biochemical sensors are highly s...

Claims

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Application Information

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IPC IPC(8): G01D5/30
Inventor 薛长国程韦滕艳华夏玲燕陈兆权胡业林
Owner ANHUI UNIV OF SCI & TECH
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