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Piezoelectric electret film and preparation method thereof

A piezoelectric electret, thin film technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc. Solve the problem of high production cost, and achieve the effect of simplified operation, wide application prospect and improved piezoelectric constant

Active Publication Date: 2014-03-26
NEWNAGY TANGSHAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the difficulty in the preparation of regular nanowire arrays, some expensive instruments are needed, and the production cost is too high
[0007] In the prior art, since there is no suitable template or method that can achieve the size of the cavity at the nanoscale, it is urgent to develop a simple, inexpensive piezoelectric electret that can be mass-produced with nanoscale cavities film

Method used

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  • Piezoelectric electret film and preparation method thereof
  • Piezoelectric electret film and preparation method thereof
  • Piezoelectric electret film and preparation method thereof

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preparation example Construction

[0036] The invention provides a method for preparing a piezoelectric electret film, comprising steps: (1) coating a polymer solution on a template with nanowires, and then drying; after drying, removing the template to obtain a template with nanowires a porous first polymer film; (2) combining at least one first polymer film dried in step (1) with a second polymer film to form a cavity; and (3) polarizing to cause step (2) to form Opposite charges are distributed on the upper and lower surfaces of the cavity to form a piezoelectric electret film.

[0037] Attached below Figure 1-5 The preparation method of the piezoelectric electret thin film of the present invention will be described in detail.

[0038] Wherein, the step (1) is a process of forming the polymer membrane into a nanopore polymer membrane according to the requirement. In this step, the thickness of the coated polymer is greater than the height of the nanowires on the template, so as to ensure that the depth of...

Embodiment 1

[0051] 1) Preparation of polymer film solution: Put 1g of PVDF into a 100mL beaker, measure 8ml of dimethylacetamide (DMF) with a 10mL graduated cylinder, add it to the beaker to dissolve PVDF (11.7wt%), and then use the beaker with Seal it with plastic wrap, ultrasonic for 30 minutes, PVDF is completely dissolved, and set aside.

[0052] 2) Preparation of zinc oxide nanowire template: using equimolar hexamethylenetetramine (HMTA) and zinc nitrate hexahydrate (ZnNO 3 6(H 2 O)) composition of the culture solution, put the prepared substrate silicon wafer with the zinc oxide seed layer facing down, put it on the top of the culture solution, grow it in a water bath environment for 5 hours, the length of the nanowire is 3 microns, and the zinc oxide is completed After the nanowire array grows, it is heated and annealed (at a temperature of 145-155°C), cleaned with ultrasonic waves, blown dry with a nitrogen gun, and dried in a vacuum oven at 80°C for 1.5 hours, finally forming a ...

Embodiment 2

[0057] 1) Preparation of polymer film solution: Put 2g of PVDF into a 150mL beaker, measure 15ml of dimethylacetamide (DMF) with a 20mL graduated cylinder, add it to the beaker to dissolve PVDF (11.7wt%), and put the beaker with fresh-keeping Membrane sealed, ultrasonic 30min, PVDF completely dissolved, set aside.

[0058] 2) Preparation of zinc oxide nanowire template: using equimolar hexamethylenetetramine (HMTA) and zinc nitrate hexahydrate (ZnNO 3 6(H 2 O)) composed of the culture solution, put the silicon wafers of the two substrates with the zinc oxide seed layer facing down, put them on the top of the culture solution, grow in the water bath environment for 5 hours, the length of the nanowire is 3 microns, and the oxidation is completed After the zinc nanowire array grows, it is heated and annealed (at a temperature of 145-155°C). Preferably, after ultrasonic cleaning, it is blown dry with a nitrogen gun, and placed in a vacuum oven at 80°C for 1.5 hours to form an oxi...

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Abstract

The invention discloses a preparation method of a piezoelectric electret film. The preparation method comprises the following steps: coating a polymer coating on a template with nano wires, and drying; subsequently removing the template so as to obtain a first polymer film with nano wire holes; combining at least one first dried polymer film and a second polymer film so as to form a cavity; polarizing so as to distribute opposite charges on the upper and lower surfaces inside the cavity and form the piezoelectric electret film. The invention further discloses the piezoelectric electret film prepared by using the preparation method. The invention further provides the piezoelectric electret film which comprises a first polymer film layer with the nano wire holes, a second polymer film layer combined on the surface of the first polymer film layer with the nano wire holes, a cavity formed between the first polymer film layer and the second polymer film layer, and opposite charges distributed on the upper and lower surfaces through polarization, wherein the formation of the nano wire holes is achieved by coating the polymer solution on the nano wire template. The invention also provides a piezoelectric element formed by the electret film.

Description

technical field [0001] The invention relates to a piezoelectric electret film and a preparation method thereof, in particular to a piezoelectric electret film manufactured through nanowire template processing and a preparation method thereof. Background technique [0002] Common dielectrics are polarized under the action of an external electric field, and when the external electric field is removed, the polarization of the dielectric also disappears. Electret is a dielectric with long-term charge. Its charge can be polarized charge that is "frozen" due to polarization, or it can be positive and negative charges caught in a "trap" on the surface or in the body. Similar to permanent magnets with residual magnetism, people also call dielectrics with long-term retention of electric charges permanent electric bodies, which are customarily called electrets. [0003] Electrets are used in industrial technology, medicine, biology and other fields, mainly including electret micropho...

Claims

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Application Information

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IPC IPC(8): H01L41/33H01L41/257H01L41/193B82Y40/00
CPCH01L41/08H01L41/45H01L41/193B82Y15/00H01L41/333B82Y40/00H10N30/00H10N30/857H10N30/084H10N30/098
Inventor 范凤茹
Owner NEWNAGY TANGSHAN
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