Nanometer biological optical tweezers based on optical micro-flow annular resonant cavity
A ring resonant cavity and bio-light technology, applied in the optical field, can solve problems such as being unable to stand still or move, and achieve low power consumption
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[0018] Example: Manipulation experiment of micron-sized polystyrene (polystyrene, PS) pellets.
[0019] 1. Sample production and parameter setting: the preparation scheme is as follows image 3 shown, first, to have a thick SiO 2 The thin film layer (d>2μm) silicon wafer is used as the substrate, and the SiN thin film or polymer SU-8 thin film is prepared as the waveguide layer; and then the annular microcavity structure is prepared by using ultraviolet lithography technology and dry or wet etching technology; Prepare a low refractive index (fluorine-doped compound, such as CYTOP, etc.) upper cover layer, and prepare a phase control electrode in the single-mode waveguide area; use overlay technology to etch the microfluidic channel in the microcavity area; finally, use PDMS to encapsulate the microfluidic channel. flow box.
[0020] 2. Measurement method: firstly, the aqueous solution of micron-sized polystyrene beads is transported into the microfluidic channel; a 1550nm ...
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