A kind of preparation method of spherical aluminum nitride powder

Abstract

The invention provides a method for preparing a spherical aluminum nitride powder. The method comprises the following steps of: 1, mixing aluminum powder with aluminum nitride powder and ammonium chloride powder, putting the mixture into a mortar for grinding, wherein the aluminum powder is spherical aluminum powder having the particle size range from 0.5 micron to 3 microns; and the aluminum nitride powder is prepared from an aluminum source which is spherical aluminum powder having the same particle size with the raw material aluminum powder through in-situ nitrogenation; 2, putting the evenly ground powder in a porous graphite crucible with a graphitic carbon felt exterior heat preservation layer and an interior protective layer and reacting in a reaction device; 3, electrifying graphite paper, and igniting the powder from bottom to cause a combustion reaction; 4, after natural cooling, releasing nitrogen in the reaction chamber, and opening the reaction device, and obtaining an off-white powder in the porous graphite crucible, namely the spherical aluminum nitride powder; and 5, controlling the particle size of the spherical aluminum nitride powder through the particle size of the spherical aluminum powder. The method provided by the invention has the characteristics of low energy consumption, simple process and low cost; and the prepared spherical aluminum nitride powder is good in homogeneity and controllable in particle size.

Description

technical field [0001] The invention belongs to the technical field of preparation of semiconductor functional materials, and in particular relates to a preparation method of spherical aluminum nitride powder. Background technique [0002] Aluminum nitride (AlN), as an important group III wide bandgap semiconductor material, has a series of high thermal conductivity, high insulation coefficient, low dielectric constant, thermal expansion coefficient matched with silicon, excellent mechanical properties and chemical stability, etc. Excellent characteristics. Therefore, aluminum nitride can be used to make advanced ceramic components, heat dissipation components, electronic ceramic substrates and electronic component packaging materials. In the process of preparing the above materials / components, the spherical aluminum nitride powder raw material with a particle size of several microns to tens of microns has many advantages. For example, spherical aluminum nitride powder can...

AI Technical Summary

Problems solved by technology

It can be seen that although the above-mentioned method has solved the problem of low product purity caused by the low nitriding rate of aluminum powder in the combustion reaction, the problem of excessive combustion temperature, excessive reaction speed, and excessive thermal gradient between the core and the outside during the combustion process The problems of poor uniformity and difficulty in controlling the morphology of aluminum nitride powder products caused by such phenomena have not been effectively solved, let alone the preparation of uniform spherical aluminum nitride powder by combustion synthesis.

This seriously affects the application of aluminum nitride in semiconductor materials

[0005] The purpose of the present invention is to overcome the disadvantages of the prior art, such as numerous procedures, long production cycle, poor product uniformity, and high cost, and provide a method of burning and synthesizing uniform spherical nitrogen under appropriate pressure, which is easy to operate, short in production cycle, and good in product uniformity. The method of aluminum powder

Images