Ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor
A heterojunction bipolar, high thermal stability technology, applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of SiGeHBT thermal instability, device and circuit characteristic drift, increase, etc., to achieve Thermally stable work, improved characteristic frequency, and uniform temperature distribution
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[0025] As mentioned above, power SiGe HBT usually adopts multi-emitter finger structure to improve current handling capability and heat dissipation capability. In the embodiment of the present invention, an 8-finger power SiGe HBT is taken as an example to describe the content of the present invention in detail. The field to which the present invention relates is not limited thereto.
[0026] Implementation example:
[0027] Considering that the current gain and its temperature coefficient of SiGe HBT are mainly determined by the Ge component content near the emitter junction side of the base region, and the Ge composition in the base region increases linearly from the emitter junction side to the collector junction side, which can introduce a minority carrier accelerating electric field to improve the characteristic frequency of the device. , under the condition that the total amount of Ge components in the base area is guaranteed to be constant, taking into account the elec...
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