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Ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor

A heterojunction bipolar, high thermal stability technology, applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of SiGeHBT thermal instability, device and circuit characteristic drift, increase, etc., to achieve Thermally stable work, improved characteristic frequency, and uniform temperature distribution

Active Publication Date: 2013-12-11
BEIJING UNIV OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, for a conventional SiGe HBT with a constant base Ge component content, its I pb Has a large positive temperature coefficient, when the operating temperature of the device increases, I pb will increase significantly such that the current gain has a negative temperature coefficient
Further considering the extremely uneven temperature distribution on each emitter finger caused by self-heating and thermal coupling effects, there will be a phenomenon of "collapse" of the current gain, degrading the working characteristics of the device (such as power gain, characteristic frequency, etc.), causing the device And circuit characteristics drift, making SiGe HBT in a thermally unstable state, which seriously limits the high-power thermal stability of the device

Method used

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Embodiment Construction

[0025] As mentioned above, power SiGe HBT usually adopts multi-emitter finger structure to improve current handling capability and heat dissipation capability. In the embodiment of the present invention, an 8-finger power SiGe HBT is taken as an example to describe the content of the present invention in detail. The field to which the present invention relates is not limited thereto.

[0026] Implementation example:

[0027] Considering that the current gain and its temperature coefficient of SiGe HBT are mainly determined by the Ge component content near the emitter junction side of the base region, and the Ge composition in the base region increases linearly from the emitter junction side to the collector junction side, which can introduce a minority carrier accelerating electric field to improve the characteristic frequency of the device. , under the condition that the total amount of Ge components in the base area is guaranteed to be constant, taking into account the elec...

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Abstract

The invention discloses a heterojunction bipolar transistor, and particularly relates to an ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor. According to the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor, a stepped distribution structure that the number of base region Ge components gradually increases from an emitter junction side to a collector junction side is adopted, current gain of a device slows down along with the trend of temperature changes, and drifting of a quiescent operating point of the device can be prevented in a wide temperature area; meanwhile, the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor can improve the characteristic frequency of the device and sensitivity of changes, along with the temperature, of the device. In addition, due to the fact that the non-equal finger separation distance symmetrical structure that indexes of the finger separation distances of emitter electrode fingers increase from the two sides of the device to the center of the device is further adopted by the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor, the phenomenon that heat of emitter electrode fingers on the outer side flows into the center can be effectively prevented from happening, the purpose of reducing thermal coupling effect among emitter electrode fingers and the purpose of improving uniformity of distribution of the temperature of an active area of the device are achieved, and the purpose of improving the thermal stability of the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor is achieved.

Description

technical field [0001] The invention relates to a silicon germanium (SiGe) heterojunction bipolar transistor, in particular to a SiGe heterojunction bipolar transistor with ultra-wide temperature range and high thermal stability used in radio frequency and microwave fields such as satellite systems, optical fiber communication systems and winmax. Background technique [0002] Compared with Si homojunction bipolar transistors (bipolar junction transistors, BJT), SiGe heterojunction bipolar transistors (heterojunction bipolar transistors, HBT) have high current handling capability, large current gain and high Early voltage at the same time, It also has excellent high-frequency characteristics, and has been widely used in mobile phone systems, Bluetooth, satellite positioning systems, automotive radar and other fields. Especially, with the rapid development of optical fiber communication, satellite communication and winmax technology, power SiGe HBT will play an increasingly im...

Claims

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Application Information

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IPC IPC(8): H01L29/737H01L21/331H01L29/40
Inventor 金冬月胡瑞心张万荣鲁东付强王肖
Owner BEIJING UNIV OF TECH
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