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A kind of aluminum-doped zinc oxide target material and preparation method thereof

A technology of aluminum-doped zinc oxide and zinc oxide, which is applied in the field of photoelectric functional materials, can solve problems such as uneven mixing of raw materials and complicated preparation methods, and achieve the effects of less impurities, overcoming complicated preparation methods, and good quality targets

Active Publication Date: 2016-04-13
江苏迪丞光电材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The preparation method of the present invention is simple, low in cost, and the quality of the prepared AZO target is high, which solves the problems of uneven mixing of raw materials and complicated preparation methods in the preparation of AZO targets in the prior art

Method used

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  • A kind of aluminum-doped zinc oxide target material and preparation method thereof
  • A kind of aluminum-doped zinc oxide target material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A method for preparing an AZO target, the specific steps are as follows:

[0023] Dissolve aluminum oxide and carboxymethyl cellulose in absolute ethanol, mix well to obtain a mixed solution, then add zinc oxide to the mixed solution, stir evenly, and obtain a mixed powder after drying, and cool the mixed powder under a pressure of 5Mpa The green body is obtained by isostatic pressing, and then the green body is sintered at 1200°C for 6 hours in an air atmosphere to obtain an AZO target, wherein the weight of absolute ethanol is 20 times the weight of zinc salt, the weight of aluminum oxide, The weight and the weight of carboxymethyl cellulose account for 1%, 98.8% and 0.2% of the total weight of aluminum oxide, zinc oxide and carboxymethyl cellulose respectively.

Embodiment 2

[0029] A method for preparing an AZO target, the specific steps are as follows:

[0030] Dissolve aluminum nitrate and polyvinyl alcohol in a mixed solvent formed by absolute ethanol and water at a volume ratio of 1:1, mix well to obtain a mixed solution, then add zinc nitrate to the mixed solution, stir evenly, and dry to obtain Mix the powder, cold isostatically press the mixed powder at 20Mpa to obtain a green body, and then sinter the green body at 1500°C for 1 hour in an air atmosphere to obtain an AZO target, wherein the weight of absolute ethanol and water is zinc salt 10 times the weight, the weight of aluminum nitrate, zinc nitrate and polyvinyl alcohol accounts for 8%, 90% and 2% of the total weight of aluminum nitrate, zinc nitrate and polyvinyl alcohol respectively.

Embodiment 3

[0036] A method for preparing an AZO target, the specific steps are as follows:

[0037] Dissolve aluminum hydroxide and polyethylene glycol in water, mix well to obtain a mixed solution, then add zinc acetate to the mixed solution, stir evenly, and dry to obtain a mixed powder, and cool the mixed powder under a pressure of 10Mpa The green body was obtained by compression molding, and then the green body was sintered at 1200°C for 4 hours in an air atmosphere to obtain an AZO target, wherein the weight of water was 50 times the weight of zinc salt, the weight of aluminum hydroxide, the weight of zinc acetate and the weight of poly The weight of ethylene glycol accounts for 5%, 94% and 1% of the sum of the weight of aluminum hydroxide, zinc acetate and polyethylene glycol respectively.

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Abstract

The invention provides an aluminum doped zinc oxide target and a preparation method thereof. The preparation method comprises the steps of dissolving aluminum salt and an adhesive agent in a solvent, adding zinc salt powder, stirring, drying, obtaining mixed powder, performing compression molding and sintering on the mixed powder sequentially, and obtaining the aluminum doped zinc oxide target. The preparation method is simple, low in production cost and suitable for industrial development, and the prepared aluminum doped zinc oxide target is higher in quality.

Description

technical field [0001] The invention relates to photoelectric functional materials, in particular to an aluminum-doped zinc oxide target material and a preparation method thereof. Background technique [0002] With the rapid development of semiconductors, computers, solar energy and other fields, transparent conductive oxide (TCO) thin films can be widely used in various displays and various optoelectronic devices due to their good conductivity and high transmittance. The most widely used transparent conductive film in the industry is tin-doped indium oxide (ITO, TindopedIndiumOxide) film, but it has the disadvantages of high price, rapid decrease of transmittance at high temperature, and easy reduction in hydrogen plasma; and ZnO The price is low, the raw material is abundant, and it is more stable than ITO in a hydrogen ion atmosphere. It can not only be made into a good semiconductor and piezoelectric film, but also can be made into a good transparent conductive film thro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/453C04B35/622
Inventor 童义平
Owner 江苏迪丞光电材料有限公司
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