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Control system and control method of high frequency switching power supply for cz silicon single crystal furnace

A technology of high-frequency switching power supply and control method, which is applied in the direction of control/regulation system, electrical components, and adjustment of electrical variables, etc., and can solve problems such as power supply output power fluctuations, poor dynamic characteristics, and affecting single crystal quality.

Inactive Publication Date: 2016-08-10
青海鑫诺光电科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a control method for a high-frequency switching power supply for a Cz silicon single crystal furnace, which solves the problem that the existing control system has poor dynamic characteristics, which leads to fluctuations in the output power of the power supply and affects the quality of the single crystal

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  • Control system and control method of high frequency switching power supply for cz silicon single crystal furnace
  • Control system and control method of high frequency switching power supply for cz silicon single crystal furnace
  • Control system and control method of high frequency switching power supply for cz silicon single crystal furnace

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Embodiment

[0168] In order to verify the effect of the above adaptive fuzzy sliding mode controller, for the TDR-100 type single crystal furnace with a full-bridge inverter high-frequency switching power supply, the parameters are selected as follows: the switching function is Among them, c=4.5 and q=50 in the control rate. Power input voltage V = 380V, switching frequency f = 20kHz. The resistance of the load is 5Ω, and the load inductance is 1mH.

[0169] Figure 6 It is the graph comparing the results of adaptive fuzzy sliding mode control and sliding mode control when the voltage setting value is 60V. Among them, the upper figure is the result of fuzzy sliding mode control, and the lower figure is the result of sliding mode control. It can be seen from the figure that the time for the adaptive fuzzy sliding mode control to reach stability is 0.005s, and the time for the sliding mode control to reach stability is 0.015s, and it is obvious that the sliding mode control has serious ...

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Abstract

The invention discloses a control system of a high frequency switching power supply for a Cz silicon single crystal furnace and a control method. The control method includes the steps of combining self-adaptive fuzzy control and sliding mode variable structure control, and aiming at a high-frequency switch heating electric power for the Cz silicon single crystal furnace to design a power controller based on a self-adaptive fuzzy control and sliding mode variable structure control method. The control system of the high frequency switching power supply for the Cz silicon single crystal furnace and the control method play respective advantages of fuzzy control and sliding mode variable structure control, further improve dynamic performance of the system, have good robustness for input voltage or load disturbance, and relieve or avoid vibration which generally happens to a sliding mode.

Description

technical field [0001] The invention belongs to the technical field of high-frequency switching power supply control for a Cz silicon single crystal furnace, and in particular relates to a control method for a high frequency switching power supply for a Cz silicon single crystal furnace. Background technique [0002] More than 90% of industrial monocrystalline silicon (whether it is solar grade or IC grade) is grown by the Cz (Czochralski) method, that is, polycrystalline silicon is melted into silicon liquid in a vacuum environment and pulled through the seed crystal in a temperature environment of about 1420 ° C. Grown into single crystals of silicon, these single crystals are widely used in the solar and integrated circuit industries as the most basic material. The heating power supply is the heart and power of the Czochralski silicon single crystal furnace, and its control accuracy, reliability, and conversion efficiency are the basis for improving production efficiency ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02M3/335
Inventor 焦尚彬刘晨张青
Owner 青海鑫诺光电科技有限公司
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