Vacuum furnace air-pumping system and air-pumping technology thereof

A technology of air extraction system and vacuum furnace, which is applied to liquid variable volume machinery, pump device, machine/engine, etc., can solve the problems of large volume of vacuum furnace air extraction system, huge vacuum air extraction system, affecting the quality of vacuum products, etc. , to achieve the effect of eliminating oil vapor pollution, saving equipment and capital, and simplifying the structure

Inactive Publication Date: 2013-09-11
苏州摩星真空科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The traditional vacuum furnace pumping system has a large volume, and a large-scale series-connected high-vacuum diffusion pump + medium-vacuum Roots pump + rough pumping unit is generally used for pumping. There are huge vacuum pumping systems, high energy consumption, and high operating costs. , oil vapor pollution is serious, affecting the quality of vacuum products and other shortcomings

Method used

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  • Vacuum furnace air-pumping system and air-pumping technology thereof
  • Vacuum furnace air-pumping system and air-pumping technology thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0026] Such as figure 1 and figure 2 As shown, a vacuum furnace pumping system provided by Embodiment 1 of the present invention is used for vacuuming, and includes a vacuum chamber 11, and the vacuum chamber 11 is respectively connected with an arc titanium pump 12, a traction molecular pump 13 and a roughing pump 14, and the traction The molecular pump 13 is connected with a backing pump 15, a first vacuum valve 16 is provided between the vacuum chamber 11 and the traction molecular pump 13, a second vacuum valve 17 is provided between the traction molecular pump 13 and the backing pump 15, and the vacuum chamber 11 and the rough pump 14 are provided with a third vacuum valve 18; wherein, the rough pump 14 is only used for the pumping of the rough pumping stage, the arc titanium pump 12 is mainly used for the pumping of the fine pumping stage, and the traction molecular pump 13 And the backing pump 15 is used for the pumping of the medium vacuum stage and the fine pumping ...

Embodiment 2

[0043] The second embodiment is roughly the same as the first embodiment, except that the remaining space between the titanium target and the base of the cathode arc source in the second embodiment is provided with an elastic heat-conducting layer, and the elastic heat-conducting layer is preferably a metal material ( Such as copper or copper alloy, etc.), the elastic heat-conducting layer can also be made of non-metallic heat-conducting materials (such as graphite, carbon fiber, etc.). When the cooling water tank in the cathode arc source base is fed into the cooling water to cool the titanium target, the elastic heat conduction layer can increase the heat transfer speed between the titanium target and the cathode arc source base, which can further improve the cooling of the titanium target efficiency.

Embodiment 3

[0045] The third embodiment is roughly the same as the first and second embodiments, except that a fourth vacuum valve is provided between the vacuum chamber and the arc titanium pump in the third embodiment. When the arc titanium pump is not working, the fourth vacuum valve is The four vacuum valves can cut off the passage between the vacuum chamber and the arc titanium pump. When the vacuum chamber is injected with the atmosphere, the arc titanium pump will not be exposed to the atmosphere, thereby avoiding oxidation of the titanium target surface.

[0046] The third embodiment is especially suitable for applications where the working cycle of the vacuum furnace is relatively short.

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Abstract

The invention discloses a vacuum furnace air-pumping system and an air-pumping technology of the vacuum furnace air-pumping system. An electric arc titanium pump, traction molecular pump and backing pump unit conducting air-pumping and arranged in parallel connection is adopted, so that a high-vacuum diffusion pump, medium-vacuum roots pump machine and roughing pump unit conducting air-pumping and arranged in parallel connection in the prior art is replaced. An electric arc titanium pump is used for rapidly pumping high-vacuum active gases and a traction molecular pump and a backing pump are used for rapidly pumping medium-vacuum gases and high-vacuum inert gases. Due to the fact that the electric arc titanium pump and the traction molecular pump are both low-energy pumps, the electric arc titanium pump mainly operates at an accurate pumping stage, and the operation time usually occupies about 70% of the whole air-pumping time, the air-pumping energy consumption can be obviously reduced, In addition, the electric arc titanium pump, traction molecular pump and backing pump unit is free of oil vapor contamination, so that the oil vapor contamination of a traditional vacuum furnace air-pumping system is eliminated.

Description

technical field [0001] The invention relates to a vacuum furnace, in particular to a vacuum furnace exhaust system and an exhaust process thereof. Background technique [0002] The traditional vacuum furnace pumping system has a large volume, and a large-scale series-connected high-vacuum diffusion pump + medium-vacuum Roots pump + rough pumping unit is generally used for pumping. There are huge vacuum pumping systems, high energy consumption, and high operating costs. , Oil vapor pollution is serious, which affects the quality of vacuum products and other shortcomings. Contents of the invention [0003] The purpose of the present invention is to provide a vacuum furnace pumping system, which uses a parallel pumping arc titanium pump + traction molecular pump + backing pump unit to replace the existing series pumping diffusion pump + Roots pump unit to achieve The purpose of simplifying the structure of the pumping system, reducing the energy consumption of pumping, elimi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/14F04B41/06
Inventor 储继国
Owner 苏州摩星真空科技有限公司
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