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Flexible ultraviolet light imprinting composite template and preparation method thereof

A technology of composite template and ultraviolet light, which is applied in the direction of photomechanical equipment, optics, patterned surface photoplate making process, etc., can solve the problems of non-curing components, slow preparation of PDMS, affecting the quality of imprinting, etc., and achieve the goal of short processing time Effect

Inactive Publication Date: 2013-09-04
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Due to some insurmountable shortcomings in the existing imprinted composite templates: the preparation of thermally cured PDMS is slow, and the structure replication deviation will occur due to the difference in thermal expansion coefficient with the master template, and the modulus of the existing thermally cured PDMS is also low; Acrylic light-curable materials cannot be completely cured in the air, and there will be uncured components on the edge when making the template, which will affect the imprint quality

Method used

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  • Flexible ultraviolet light imprinting composite template and preparation method thereof
  • Flexible ultraviolet light imprinting composite template and preparation method thereof
  • Flexible ultraviolet light imprinting composite template and preparation method thereof

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Embodiment 1

[0038] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, the preferred embodiments are only limited to explain the present invention, the protection scope of the present invention should include the entire content of the claims, and those skilled in the art can All the contents of the claims of the present invention are realized.

[0039] figure 1 It is a structural schematic diagram of the flexible ultraviolet imprinting composite template of the present invention. The flexible ultraviolet imprinting composite template of the present invention is a three-layer composite structure, including a flexible supporting layer 1, an intermediate layer 2 and a rigid structural layer 3.

[0040] The flexible supporting layer 1 is a flexible transparent polymer material, which can be selected from polyurethane, epoxy resin, polyester, silicone rubber, polycarbonate (PC), polymethyl methacrylate, polydimethyl ...

Embodiment 2

[0052] The flexible support layer 1 is made of GE RTV615 silicone rubber resin.

[0053] The middle layer 2 selects 3-mercaptopropionic acid-[2,4,6-trioxo-1,3,5-triazine-1,3,5(2H,4H,6H)-subgroup]tri-2, A mixture of 1-ethylene glycol ester, pentaerythritol triallyl ether, and 1,6-hexanediol diacrylate, in which 3-mercaptopropionic acid-[2,4,6-trioxo-1 ,3,5-triazine-1,3,5(2H,4H,6H)-subgroup]tri-2,1-ethylene glycol ester preferably has a mass percentage content of 60%-65%, pentaerythritol triallyl The mass percentage content of base ether is preferably 25%-30%, and the mass percentage content of 1,6-hexanediol diacrylate is preferably 5%-15%.

[0054] The rigid structure layer 3 is a mixture of (mercaptopropyl) polymethylsiloxane, pentaerythritol triallyl ether, and pentanediol diacrylate. In the mixture, (mercaptopropyl) polymethylsiloxane The mass percentage content is preferably 70%-75%, the mass percentage content of pentaerythritol triallyl ether is preferably 15%-20%, and...

Embodiment 3

[0057] The flexible support layer 1 is made of polyurethane.

[0058] The middle layer 2 selects the mixture of trimethylolpropane three (3-mercaptopropionate), triallyl isocyanurate, 1,3 dibutanol diacrylate, and in the mixture, trimethylol The mass percentage content of propane three (3-mercaptopropionate) is preferably 45%-50%, the mass percentage content of triallyl isocyanurate is preferably 35%-40%, and 1,3 dibutanol diacrylic acid The ester mass percentage content is preferably 10%-15%.

[0059] The rigid structure layer 3 is a mixture of (mercaptopropyl) polymethylsiloxane, vinyl fully substituted cage siloxane, trimethylolpropane triacrylate, and dipropylene glycol diacrylate. In the mixture, ( The mass percentage content of mercaptopropyl) polymethylsiloxane is preferably 40%-45%, the mass percentage content of vinyl fully substituted cage siloxane is preferably 10%-15%, trimethylolpropane triacrylate The mass percentage content is preferably 30%-35%, and the mass ...

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Abstract

The invention provides a flexible ultraviolet light imprinting composite template and a preparation method thereof. The composite template adopts a three-layer structure and comprises a flexible supporting layer, a middle layer and a rigid structure layer, wherein the flexible supporting later is a low-elasticity-modulus polymer substrate; the middle layer is an ultraviolet light curing cross-linking agent of a mixture of a polyfunctionality organic sulfydryl monomer and a polyfunctionality organic olefin monomer; the rigid structure layer is an ultraviolet light curing cross-linking agent of a mixture of a polyfunctionality sulfydryl monomer containing silicon and a polyfunctionality olefin monomer containing silicon; and the surface of the rigid structure layer adopts a micro-nano imprinting structure. The lexible ultraviolet light imprinting composite template is cured and prepared in an ordinary laboratory environment, and vacuum or nitrogen protection is not required; when the ultraviolet light curing imprinting is performed, mechanical assistance is not required; and the composite template has the advantages as follows: the flexible template imprinting is self-adapted to the shape of the substrate, and the rigid template can duplicate a high-resolution nano-structure.

Description

technical field [0001] The invention relates to a flexible ultraviolet light embossing composite template and a preparation method thereof, in particular to a flexible ultraviolet light imprinting composite template based on a mercapto-ene photocrosslinking mixture and a preparation method thereof. Background technique [0002] UV-curable nanoimprint technology has gradually become the mainstream of imprint technology due to its characteristics of fast forming, low pressure required, and good compatibility with traditional semiconductor processes. As a low-cost, high-resolution, and high-yield pattern preparation technology that is not limited by the limit of lithography, UV-curable nanoimprint technology has been widely used in the fields of biochip sensors, LED patterned substrates, and subwavelength optical devices. It has become a preparation technology with relatively low price, reliable performance and mass production capacity. [0003] The imprint template is one of ...

Claims

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Application Information

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IPC IPC(8): G03F7/00
Inventor 李志炜张满杨勇胡松邱传凯
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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