Top-emitting organic light-emitting diode (OLED) device anode structure and preparation technology thereof
An anode structure and device technology, which is applied in the field of preparation of anode structures of top light-emitting OLED devices, can solve problems such as device failure, device disconnection, and yield decline in large-scale production, so as to reduce the hole injection barrier and reduce the probability of short circuit. , the effect of improving stability
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Embodiment 1
[0026] Embodiment 1: The anode structure of the top-emitting OLED device of the present invention has a base thickness of 1mm, made of silicon and SiO 2 Composition, which is characterized by covering the silicon surface with SiO with a thickness of 160nm 2 film. Four-layer films were prepared on the substrate in the following manner:
[0027] Step 1: Deposit Cr as a substrate-compatible layer on the cleaned substrate to achieve good compatibility with the substrate; the thickness of the substrate-compatible layer is 15 nm, and the thin film adopts PVD such as electron beam evaporation, thermal evaporation, ion beam assisted deposition, and sputtering Method preparation;
[0028] Step 2: Metal Al with low absorption and high reflection characteristics in the visible light band is deposited on the substrate compatible layer as an intermediate reflectivity layer with a thickness of 35 nm. The preparation of the intermediate reflectivity layer meets the requirement of high ref...
Embodiment 2
[0033] Embodiment 2: The anode structure of the top-emitting OLED device of the present invention has a substrate thickness of 1mm, made of silicon and SiO 2 Composition, which is characterized by covering the silicon surface with SiO with a thickness of 160nm 2 film. Cover the substrate with four layers of film in the following manner:
[0034] Step 1: Deposit a substrate-compatible layer made of Cr film on the cleaned substrate to achieve good compatibility with the substrate; the thickness of the substrate-compatible layer is 10nm, and the film is prepared by electron beam evaporation;
[0035] The second step: Deposit the first interfacial transition layer on the substrate compatible layer, which is made of Cr and Al alloys. The film is prepared by the PVD method of a multi-source evaporation system, and the ratio is adjusted by controlling the film growth rate between different components. The film thickness is 5nm;
[0036] Step 3: Depositing metal Al with low absorpt...
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