Gold and Fe Doped Negative Temperature Coefficient Single Crystal Silicon Thermistors
A technology of negative temperature coefficient and thermistor, which is applied to resistors with negative temperature coefficient and other directions to achieve the effect of simple preparation process
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Embodiment 1
[0024] a. Using an N-type (111) single crystal silicon wafer with an initial resistivity of 1 Ω cm and a thickness of 320 μm, first place the silicon wafer in deionized water and ultrasonically clean it for 3 minutes, then ultrasonically clean it in acetone for 5 minutes, and then wash it in methanol solution Ultrasonic cleaning in medium for 5min, deionized water cleaning, and then in NH 3 ·H 2 O:H 2 o 2 :H 2 Wash in O=1:2:5 (APM) solution for 15 minutes, keep the temperature of APM solution at 75±2°C, wash with cold and hot deionized water for 3 times, and then use 0.5%HF and 10%H 2 o 2 Soak in the mixed solution for 2 minutes, and finally soak in 2.0% HF solution for 2 minutes, wash with hot and cold deionized water for 3 times, and set aside;
[0025] b, the chloroauric acid and ferric chloride were dissolved in absolute ethanol respectively to prepare a concentration of 3.88 × 10 -5 mol / ml chloroauric acid ethanol solution and the concentration is 4.62×10 -6 mol / ml...
Embodiment 2
[0031] a. Using an N-type (111) single crystal silicon wafer with an initial resistivity of 1 Ω cm and a thickness of 320 μm, first place the silicon wafer in deionized water and ultrasonically clean it for 3 minutes, then ultrasonically clean it in acetone for 5 minutes, and then use methanol solution Ultrasonic cleaning in medium for 5min, deionized water cleaning, and then in NH 3 ·H 2 O:H 2 o 2 :H 2 Wash in O=1:2:5 (APM) solution for 15 minutes, keep the temperature of APM solution at 75±2°C, wash with cold and hot deionized water for 4 times, and then use 0.5%HF and 10%H 2 o 2 Soak in the mixed solution for 2 minutes, and finally soak in 2.0% HF solution for 2 minutes, wash with hot and cold high-purity water 4 times, and set aside;
[0032] b, the chloroauric acid and ferric chloride were dissolved in absolute ethanol respectively to prepare a concentration of 3.88 × 10 -5 mol / ml chloroauric acid ethanol solution and the concentration is 5.31×10 -4 mol / ml ethanol ...
Embodiment 3
[0038] a. Using an N-type (111) single crystal silicon wafer with an initial resistivity of 1 Ω cm and a thickness of 320 μm, first place the silicon wafer in deionized water and ultrasonically clean it for 3 minutes, then ultrasonically clean it in acetone for 5 minutes, and then wash it in methanol solution Ultrasonic cleaning in medium for 5min, deionized water cleaning, and then in NH 3 ·H 2 O:H 2 o 2 :H 2 Wash in O=1:2:5 (APM) solution for 15 minutes, keep the temperature of APM solution at 75±2°C, wash with cold and hot deionized water for 5 times, and then use 0.5%HF and 10%H 2 o 2 Soak in the mixed solution for 2 minutes, and finally soak in 2.0% HF solution for 2 minutes, wash with hot and cold deionized water for 5 times, and set aside;
[0039] b, the chloroauric acid and ferric chloride were dissolved in absolute ethanol respectively to prepare a concentration of 3.88 × 10 -5 mol / ml chloroauric acid ethanol solution and concentration is 6.94×10 -4 mol / ml eth...
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