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Transfer method of ultrathin porous aluminum oxide template

A technology of porous alumina and transfer method, which is applied in the field of transfer of ultra-thin porous alumina template, which can solve the problems of limited thickness of aluminum film, uneven corrosion rate of phosphoric acid, difficulty in transfer of ultra-thin porous alumina template, etc., to achieve performance change , Easy to operate transfer processing effect

Inactive Publication Date: 2013-07-10
山西师范大学
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, it is difficult to transfer the ultra-thin porous alumina template. In the prior art, aluminum is sputtered on the required substrate to prepare the ultra-thin porous alumina template, and then anodized. The thickness of the aluminum film is limited, which limits the time of oxidation, so it is difficult to obtain a highly ordered nanopore structure
Bai Anqi et al. (Acta Physica Sinica, 58(7), 2009, 4997-5001) pasted the secondary oxidized template on the silicon substrate in reverse, and removed the aluminum substrate and barrier layer at the bottom of the alumina template by the drop method to obtain Discrete, ultra-thin alumina template with transparent holes, but the use of drop method makes the corrosion rate of phosphoric acid uneven and difficult to ensure the success rate and repetition rate of through holes
Shen Wenzhong et al reported the preparation method of ultra-thin alumina template with a pore size of 50-90 nanometers in the patent "Preparation method of thickness-controllable, free and independent ultra-thin porous alumina template" (patent 200510025946.4), but did not specifically introduce the template transfer process

Method used

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  • Transfer method of ultrathin porous aluminum oxide template
  • Transfer method of ultrathin porous aluminum oxide template
  • Transfer method of ultrathin porous aluminum oxide template

Examples

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Embodiment 1

[0031] Embodiment 1, the aperture is 100 nanometers, and the preparation and transfer of the ultra-thin porous aluminum oxide template that the thickness is 200 nanometers

[0032] (1) First, pretreat the aluminum flakes, wash the high-purity aluminum flakes (99.99%) with acetone, and then place them in a mixed aqueous solution of perchloric acid and absolute ethanol with a volume ratio of 1:4, and use the graphite plate as the cathode , the aluminum sheet was used as the anode, the voltage was 10 volts, the temperature was 10° C., and the time was 180 seconds for electrolytic polishing, and then rinsed with deionized water for 1 minute.

[0033] (2) Use the aluminum sheet obtained in step (1) as the anode, the graphite plate as the cathode, and 0.3 mol / L oxalic acid as the electrolyte, the temperature of the electrolyte is 0°C, and the aluminum sheet is oxidized for the first time at a constant voltage of 60 volts. The time is 2 hours, and the electrolytic solution is stirred...

Embodiment 2

[0042] Example 2, the preparation and transfer of an ultra-thin porous alumina template with a pore size of 300 nanometers and a thickness of 600 nanometers

[0043] (1) First, pretreat the aluminum flakes, wash the high-purity aluminum flakes (99.99%) with acetone, and then place them in a mixed aqueous solution of perchloric acid and absolute ethanol with a volume ratio of 1:4, and use the graphite plate as the cathode , the aluminum sheet was used as the anode, the voltage was 10 volts, the temperature was 10° C., and the time was 180 seconds for electrolytic polishing, and then rinsed with deionized water for 1 minute.

[0044] (2) The aluminum sheet obtained in step (1) is used as the anode, the graphite plate is used as the cathode, and 0.16mol / L citric acid aqueous solution is used as the electrolyte, the temperature of the electrolyte is 10°C, and the aluminum sheet is subjected to the first Secondary oxidation, the time is 1 hour, and the electrolytic solution is stir...

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Abstract

The invention discloses a transfer method of an ultrathin porous aluminum oxide template. The transfer method comprises the following steps of: 1, placing an aluminum sheet in an electrolyte for first-time oxidization; 2, removing a porous aluminum oxide layer on the aluminum sheet subjected to first-time oxidization, then placing in the electrolyte for second-oxidization to obtain a porous aluminum oxide template; 3, spinning protection glue on the front surface of the porous aluminum oxide template; 4, placing the porous aluminum oxide template in a corrosive liquid for removing an aluminum base; 5, transferring the porous aluminum oxide template obtained in the step 4 to a soaking solution by using filter paper or a mesh to remove a baffle layer; and 6, transferring the porous aluminum oxide layer template obtained in the step 5 to a substrate so that the transfer of the porous aluminum oxide template is completed. The transfer method of the ultrathin porous aluminum oxide template is combined with other physical sputtering methods so that nano lattice array structures made of various materials can be prepared at low price, and the size and the spacing of nano units can be changed through regulating the pore diameter and the pore spacing of the template, and thus the property of the nano material is improved.

Description

technical field [0001] The invention relates to a method for transferring an ultrathin porous alumina template. Background technique [0002] The porous alumina template has good heat resistance, stability and insulation, and the preparation method is simple and the price is low. It is widely used in the fields of surface anticorrosion, catalysts, sensors and filter materials. This template not only has a highly ordered array of regular cylindrical nanopores, but also can adjust the pore size, pore spacing and thickness of the template by controlling the experimental parameters, and the pore density can be as high as 10 11 cm -2 , are widely used to prepare large-area and highly ordered array structures of various metals, semiconductors, oxide nanodots, nanowires and nanotubes. Since the pore size, pore spacing and thickness of the template itself can be adjusted in a large range, it is easy to control the shape and size of the prepared nanomaterials. The ultra-thin porou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D11/12
Inventor 邓晨华许小红丁古巧王芳秦秀芳
Owner 山西师范大学
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