Preparation method of monocrystalline AlN nanocones and nanosheets
A technology of nanocones and nanosheets, applied in the field of low-dimensional semiconductor nanostructure growth
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Embodiment 1
[0023] A preparation method of single crystal AlN nanocones and nanosheets, which is to spread 0.3 g of Al powder with a purity of 99.999% on a molybdenum boat, and buckle a silicon substrate deposited with a layer of aluminum powder directly above the molybdenum boat At 5-6 mm, put the molybdenum boat into a small quartz test tube with a diameter of 20 mm, and then place the small quartz tube in the reaction zone of a horizontal quartz tube furnace with a diameter of 80 mm. After sealing the vacuum system, start vacuuming. When the vacuum degree of the vacuum system is lower than 5 Pa, a flow rate of 500 sccm argon gas is introduced to flush the system. After 20 minutes, the flow of argon was turned off, and the system was heated. When the furnace temperature reached 900° C., 50 sccm of ammonia and argon were simultaneously fed in for 2 hours. Finally, stop the heating system, turn off the flow of ammonia gas when the temperature drops to 680 °C, and at the same time cool nat...
Embodiment 2
[0025] A preparation method of single crystal AlN nano-cones and nano-sheets is to put 0.3 g of Al powder with a purity of 99.999% into a molybdenum boat, and place the silicon wafer deposited with aluminum powder as a growth substrate on the positive side of the molybdenum boat. 5~6 mm above, put the molybdenum boat into a small quartz test tube with a diameter of 20 mm, and then place the small quartz tube in the reaction zone of a horizontal quartz tube furnace with a diameter of 80 mm. After sealing the vacuum system, start vacuuming. When the vacuum degree of the vacuum system is lower than 5 Pa, a flow rate of 500 sccm argon gas is introduced to flush the system. After 20 minutes, the flow of argon gas was turned off, and the system was heated. When the furnace temperature reached 850° C., 100 sccm of ammonia and argon gas were introduced and kept for 2 hours. Finally, stop the heating system, turn off the flow of ammonia gas when the temperature drops to 680 °C, and at ...
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