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Single-cavity double-electrode discharge chamber based on improved cross-flow fan impeller

A discharge cavity and two-electrode technology, applied in the field of lasers, can solve the problems of complex manufacturing process and operation method, high laser price, complex system structure, etc., and achieve the effect of ensuring discharge synchronization, simplifying laser system, and reducing noise.

Active Publication Date: 2016-03-16
RAINBOW SOURCE LASER RSLASER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0021] Aiming at the disadvantages of MOPA, MOPRA, and MOPO system structures used in existing dual-cavity excimer lasers, the technical problem to be solved by the present invention is to propose a new type of single-cavity double-electrode discharge cavity and corresponding lasers to solve the problem based on dual-cavity The structural laser has the disadvantages of high price, large volume, complicated manufacturing process and operation method, and can achieve narrow linewidth and high-power high-quality laser beam output

Method used

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  • Single-cavity double-electrode discharge chamber based on improved cross-flow fan impeller
  • Single-cavity double-electrode discharge chamber based on improved cross-flow fan impeller
  • Single-cavity double-electrode discharge chamber based on improved cross-flow fan impeller

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Embodiment approach

[0026] According to a preferred embodiment of the present invention, each set of main discharge electrodes includes an anode and a cathode, and a discharge area is formed between the anode and the discharge surface of the cathode.

[0027] According to a preferred embodiment of the present invention, the cathode is installed on an insulating plate, and the insulating plate is hoisted on the top of the left and right chambers; the anode is fixed on an anode base, and the anode base It is fixed on the cavity, and its position is such that the anode is parallel to and directly opposite to the cathode.

[0028] According to a preferred embodiment of the present invention, it also includes a bead and a peaking capacitor, and the peaking capacitor is used for discharging and storing energy; the insulating plate is fixed to the discharge chamber through the bead; The outer side of the board, and communicate with one end of the peaking capacitor, and form a ground loop with the cavity...

specific Embodiment approach

[0054] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0055] 1. Basic structure of a single-chamber double-electrode discharge chamber

[0056] Figure 4 It is a structural diagram of a single-chamber double-electrode discharge chamber according to an embodiment of the present invention. Such as Figure 4 As shown, the discharge chamber mainly includes a discharge chamber body 1 , two sets of main discharge electrodes, two sets of gas circulation systems, a heat dissipation system, a dust removal device and a high-voltage pulse charging module 4 .

[0057] The discharge chamber body 1 is a closed gas container, which is designed to implement the relevant standards of pressure vessels, and is used to store 3-6 atm corrosive mixed gases, such as halogen gases that produce ex...

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Abstract

The invention belongs to the technical field of lasers, and in particular relates to a single-cavity double-electrode discharge cavity and an excimer laser using the discharge cavity, which includes a cavity body and two sets of main discharge electrodes, and the cavity body includes left and right chambers to form a symmetrical The double-chamber structure cavity shape, the cross-sectional shape of each chamber is a "pear" shape with a small upper part and a larger lower part. The left and right chambers are connected and connected at the symmetrical plane of the entire discharge chamber. The two sets of main discharge electrodes are respectively Located on the upper side of the left and right chambers. Two sets of fan impellers are set in the cavity to drive the gas to ensure that the gas passing through the discharge area is fresh gas each time; and the fan impellers are cross-flow fan impellers. The invention realizes the function of double chambers through a single chamber structure, which not only reduces the complexity of the system, but also ensures the discharge synchronization of the discharge chambers. At the same time, the layout of the fan blades in the impeller used in the discharge chamber can improve the axial uniformity of the fan and reduce the noise of the fan system.

Description

technical field [0001] The invention belongs to the technical field of lasers, and in particular relates to a single-cavity double-electrode discharge chamber of an excimer laser, in particular to a single-cavity double-electrode discharge chamber based on an improved cross-flow fan impeller. The discharge chamber of the present invention can also be applied to other devices in which gas is excited to generate energy radiation. Background technique [0002] Excimer laser is a conventional gas laser for ultraviolet characteristic applications. It is currently considered to be the best light source choice for lithography, and it is the main working light source in the integrated circuit lithography lithography industry. [0003] Traditional discharge excited excimer lasers are designed with a single-cavity single-electrode structure. With the further development of optical lithography technology, the light source is required to have narrower spectral width (linewidth), higher...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/03H01S3/036H01S3/038F04D29/26
CPCH01S3/005H01S3/03H01S3/036H01S3/0384H01S3/0385H01S3/0388H01S3/076H01S3/08068H01S3/09713H01S3/10092H01S3/225H01S3/2333H01S3/235H01S3/2383H01S3/038H01S3/097H01S3/08
Inventor 丁金滨刘斌沙鹏飞王宇周翊赵江山
Owner RAINBOW SOURCE LASER RSLASER
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