Hard x-ray micro-focus multi-thickness ratio compound multilayer laue lens

Abstract

The invention relates to a hard X-ray micro-focus multi-thickness-ratio composite multi-layer film Laue lens. Different film thickness ratios gamma, citing WSi2 / Si material combination as an example, gamma=dsi / (dWSi+dsi), are selected aiming at local gratings of different areas from the center to the outer layer in a lens structure; a small gamma is selected for a grating which is large in period and is located in the center area and stress is reduced; a large gamma is selected for a grating which is small in period and is located on the outer layer area and diffraction efficiency is ensured. Compared with a traditional multi-layer film Laue lens, the hard X-ray micro-focus multi-thickness-ratio composite multi-layer film Laue lens puts forward the design of a multi-thickness-ratio composite structure, on the premise that diffraction efficiency is ensured, and reduces stress of film series in a plating and forming process of thousands of layers of films, therefore a thicker multi-layer film structure can be manufactured, and the aperture and the luminous flux of the Laue lens are effectively increased.

Description

technical field [0001] The invention relates to the research of a high-resolution X-ray micro-focusing element, which belongs to the field of precision optical element research, in particular to a hard X-ray micro-focusing multi-thickness ratio compound multi-layer film Laue lens. Background technique [0002] According to the Rayleigh criterion, the shorter the wavelength of the light source, the higher the resolution of the optical system. X-ray wavelengths are much smaller than visible light, enabling nanoscale resolution. Compared with soft X-rays, hard X-rays have higher energy and greater penetration depth. Hard X-ray microscopy can realize the identification of high atomic number elements and non-destructive depth detection of thicker samples. The development of scanning X-ray fluorescence microscopy and 3D tomography has made hard X-ray microscopy gain important applications in the fields of life, materials, and environmental science. The resolution of an X-ray mic...

AI Technical Summary

Problems solved by technology

[0004] Since the Laue lens is a one-dimensional zone plate structure based on multilayer film technology, the stress problem generated during the deposition of thousands of layers of film makes it difficult to enlarge the lens aperture

In order to realize the two-dimensional focusing function, two lenses need to be spliced ​​vertically, and the flux attenuation is greater after the incident light is diffracted twice; this limits the luminous flux that can be obtained when using a multilayer Laue lens for focusing imaging experiments. Affects quality and acquisition time of hard X-ray microscopy

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