Fluorescence enhanced microarray biochip based on micro/nano periodic structures and method for preparing same
A periodic structure and biochip technology, applied in the field of enhanced fluorescence, can solve the problems of cumbersome experimental process, high hazard, unfavorable chip long-term storage, etc., and achieve the effect of flexible and diverse materials and simple structure
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[0048] Specific embodiments of the present invention will be further described below.
[0049] Obtaining a series of micro / nano periodic structures with a period of 400-800nm and a depth of 20-100nm on the quartz substrate is realized by the method of double-beam interference etching. At a given laser wavelength, gratings with different periods can be obtained by changing the angle of the mirrors in the interference lithography apparatus. The specific preparation process is divided into three steps: first, the quartz substrate is ultrasonically cleaned in a 1% volume fraction of Hellmanex II (surfactant) solution for 15-20min, then thoroughly rinsed with deionized water and alcohol, and thoroughly cleaned in air. dry. Second, the cleaned quartz substrate is suspended coated with a layer of positive photoresist with a thickness of 0.5-2 μm. The patterning of the photoresist was achieved by exposing for 100 s with an interferometric He-Cd laser. By changing the irradiation ...
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