Monocrystalline silicon zone melting drawing furnace control system

Abstract

The invention discloses a monocrystalline silicon zone melting drawing furnace control system, which comprises an upper shaft rotation speed detection device, an upper shaft feeding speed detection device, a lower shaft rotation speed detection device, and a lower shaft drawing speed detection device, a hearth temperature detection device, a hearth air pressure detection device, a data acquisition module, a memory, a central processor, a control signal output module, an upper shaft rotation speed controller, an upper shaft feeding speed controller, a lower shaft rotation speed controller, a lower shaft drawing speed controller, a hearth temperature controller, and a hearth air pressure controller; the upper shaft feeding speed, the lower shaft drawing speed, the upper and lower shaft rotation speeds, the hearth temperature, and the hearth inert gas feeding pressure are controlled through linkage; and thus the diameter and circularity of a drawn monocrystalline silicon rod meet design requirements.

Description

technical field [0001] The invention relates to a single crystal silicon preparation technology, in particular to a single crystal silicon zone melting and stretching furnace control system. Background technique [0002] The zone melting furnace is a kind of equipment that melts polysilicon materials such as polysilicon rods in an inert gas environment, and grows high-purity dislocation-free single crystal silicon by the suspension zone melting method. The mechanical parts of the main furnace body of the zone melting furnace are as follows: figure 1 As shown, it includes a furnace 4 heated by a high-frequency induction coil, a feeding device for slowly feeding polycrystalline silicon rods 5 into the furnace 4, a stretching device for stretching silicon rods into monocrystalline silicon rods, feeding device, furnace 4. The stretching device is arranged on the furnace frame 10 in the order of upper, middle and lower. The part where the polysilicon rod 5 passes through the fur...

AI Technical Summary

Problems solved by technology

[0010] The stroke limit switches of the upper and lower seats adopt ordinary mechanical switches, which are easy to be damaged, causing the sliding seat to move too far and get stuck;

[0011] The control system is easily interfered by the high-frequency induction power supply system, which leads to the instability of the stretching process and the decline of the product qualification rate;

[0012] The coupling between the motor and the transmission pair is very easy to damage;

[0013] The worm of the fast lifting motor transmission pair of the slide seat is easy to break

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