Micromechanical filter with fully sealed structure

Abstract

The invention discloses a micro mechanical filter of a full-sealing structure. A basic structure of the filter is of an interdigital stripline filter structure and formed by vertically overlapping two layers of dielectric materials, and an interdigital metal electrode layer manufactured by a micro mechanical process is arranged between the two layers of dielectric materials. A cavity manufactured by using an etching process is arranged on an upper surface of a lower dielectric, through holes are arranged on both an upper dielectric layer and the lower dielectric layer, and metal layers are manufactured on inner walls of the through holes. A surface electrode layer is manufactured by using the micro mechanical process on surfaces of both the upper dielectric layer and the lower dielectric layer, and an input lead-out line and an output lead-out line are arranged on a surface of one of the two dielectric layer. Compared with the existing micro mechanical filter, size is further reduced, a wafer level packaging method is used, a shortcoming that the existing micro mechanical filter cannot achieve full sealing is overcome, outer casing packaging is not needed, and assembly is simplified.

Description

technical field [0001] The invention relates to a fully-sealed micro-mechanical filter with wafer-level packaging, in particular to a filter based on micro-mechanical technology and made of high-resistance silicon or quartz materials. Background technique [0002] With the development of communication technology, the whole system puts forward requirements for microwave filters such as large bandwidth, small size, and high amplitude and phase consistency. Traditional microwave filter technologies such as cavity filters, microstrip filters, dielectric filters, low-temperature co-fired ceramic (LTCC) filters, and thin-film bulk acoustic wave filters are difficult to achieve in terms of bandwidth, volume, and amplitude-phase consistency. fulfil requirements. [0003] Micromechanical filter is a new type of device that combines microwave filter design and micromechanical process technology. It successfully applies MEMS technology to the design of microwave filter by using silico...

AI Technical Summary

Problems solved by technology

[0005] The problem to be solved by the present invention is to provide a micro-mechanical filter with a fully sealed structure and high reliability, which overcomes the shortcomings of existing micro-mechanical filters that cannot be fully sealed, and further reduces the volume of the filter. It has many advantages such as large bandwidth, small size, good amplitude and phase consistency, and mass production.

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