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Method and apparatus of manufacturing piezoelectric vibrating reed, piezoelectric vibration reed, piezoelectric vibrator, oscillator, electronic apparatus and radio-controlled timepiece

A technology of piezoelectric vibrating piece and manufacturing method, which is applied in the field of radio clocks, and can solve problems such as difficult simultaneous suppression

Inactive Publication Date: 2012-11-14
SEIKO INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is difficult to simultaneously suppress the spread of turbulent flow below the corners of the square wafer and the spread of turbulent flow below the sides of the square wafer in a straightening plate having blades that have the same distance from the center of rotation over the entire circumference.

Method used

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  • Method and apparatus of manufacturing piezoelectric vibrating reed, piezoelectric vibration reed, piezoelectric vibrator, oscillator, electronic apparatus and radio-controlled timepiece
  • Method and apparatus of manufacturing piezoelectric vibrating reed, piezoelectric vibration reed, piezoelectric vibrator, oscillator, electronic apparatus and radio-controlled timepiece
  • Method and apparatus of manufacturing piezoelectric vibrating reed, piezoelectric vibration reed, piezoelectric vibrator, oscillator, electronic apparatus and radio-controlled timepiece

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Embodiment Construction

[0073] (Piezoelectric vibrating piece)

[0074] First, a piezoelectric vibrating reed according to an embodiment of the present invention will be described with reference to the drawings.

[0075] figure 1 is a plan view of the piezoelectric vibrating piece 4 .

[0076] figure 2 Yes figure 1 The cross-sectional view at the section line A-A.

[0077] like figure 1 As shown, the piezoelectric vibrating piece 4 of this embodiment is a tuning-fork type vibrating piece formed of a square crystal wafer (hereinafter referred to as “square wafer”), and vibrates when a predetermined voltage is applied. The piezoelectric vibrating reed 4 includes: a pair of vibrating arm portions 10, 11 arranged in parallel; a base portion 12 integrally fixing the proximal ends of the pair of vibrating arm portions 10, 11; Vibrating arm grooves 18 on both main surfaces of 11. The vibrating arm groove portion 18 is formed along the longitudinal direction of the vibrating arm portion 10 , 11 fr...

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Abstract

A photoresist film forming process to form a film through a spin coating method is included, a plurality of groove portions (90) and a plurality of wall portions (95) are formed in an upper surface (88a) of a flow regulating plate (88), among the plurality of groove portions (90), the diameter of the outer side surface (91a) of a first groove portion (91) is set to be smaller than the longest distance (alpha) from the rotation center (K) to the outer edge (66) of the square wafer (65), and is set to be larger than the shortest distance (beta) from the rotation center (K) to the outer edge (66) of the square wafer (65), and among the plurality of groove portions (90), the diameter of the outer side surface (92a) of a second groove portion (92) is set to be smaller than the shortest distance (beta) from the rotation center (K) to the outer edge (66) of the square wafer (65).

Description

technical field [0001] The present invention relates to a method for manufacturing a piezoelectric vibrating piece, a manufacturing device for a piezoelectric vibrating piece, a piezoelectric vibrating piece, a piezoelectric vibrator, an oscillator, electronic equipment, and a radio clock. Background technique [0002] In recent years, piezoelectric vibrators using crystals (quartz) or the like have been used as time sources, timing sources such as control signals, reference signal sources, and the like in cellular phones and portable information terminal devices. Various types of such piezoelectric vibrators have been provided, and one of them is known as a piezoelectric vibrator having a so-called tuning fork type piezoelectric vibrating piece. The tuning-fork piezoelectric vibrating reed is a sheet-shaped crystal plate, and has a pair of vibrating arms arranged side by side in the width direction; [0003] A specific method of forming the outer shape of the tuning-fork t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/02H03H9/02G04C9/02
CPCH01L41/332H03H3/02H03H2003/026H03H9/1021H03H9/21Y10T29/42H10N30/082
Inventor 河口昌之
Owner SEIKO INSTR INC
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