Cantilever beam frequency detector and detection method based on micromechanical gallium arsenide

A frequency detector, gallium arsenide-based technology, applied in the direction of frequency measurement device, frequency to amplitude conversion, etc., to achieve the effect of novel structure, low DC power consumption, and small size

Inactive Publication Date: 2012-10-17
SOUTHEAST UNIV
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Problems solved by technology

The existing microwave frequency detection technology is mainly based on the principles of heterodyne method, counting method and resonance method. They have the advantages of high precision and wide frequency band, but their biggest disadvantage is the need for more sophisticated measuring instruments

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  • Cantilever beam frequency detector and detection method based on micromechanical gallium arsenide
  • Cantilever beam frequency detector and detection method based on micromechanical gallium arsenide
  • Cantilever beam frequency detector and detection method based on micromechanical gallium arsenide

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Embodiment Construction

[0026] The following is a further explanation of the present invention.

[0027] See Figure 1-3 , The Cantiletic Bulberry Frequency detector based on micro -mechanical arsenidiac -based, which provides a micro -mechanical arsenidiac, which includes

[0028] Power assignor PD, Periodical Phase PS, Low -pass filter F, and arsenide Semiconductor Semiconductor Farm Field Field Field Field Field Fields

[0029] The power distributioner is used to receive the side microwave signal to be available, and the microwave signal to the side of the side of the side is divided into two branches signals with the same aspect and the same aspect, that is, the first microwave signal and the second microwave signal, and output them to gallium arsenide separately效 Metal semiconductor field effect tube structure and phase migrant;

[0030] The phase movement device is used to receive the second road microwave signal, so that the signal generates a phase shift that is positively proportional to the freq...

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Abstract

The invention discloses a cantilever beam frequency detector and a cantilever beam frequency detection method based on micromechanical gallium arsenide. The frequency detector comprises a power divider (PD), a phase shifter (PS), a low pass filter (F) and a gallium arsenide metal semiconductor field effect transistor (MESFET), wherein the PD is used for receiving a microwave signal to be detected and dividing the microwave signal to be detected into two branch signals with the same amplitude and phase. The detection method comprises the following steps that: when a pull-down electrode (8) is loaded with direct current (DC) offset and a cantilever beam (6) is pulled down and contacted with a gate (4), the gate (4) is loaded with the two paths of microwave signals simultaneously, so that the magnitude of saturation current between a source (2) and a drain (3) is changed; and through a capacitor and a filter, the frequency is measured by detecting the magnitude of the saturation current between the source (2) and the drain (3). By the detector and the method, DC power consumption is low, and the frequency is easy to measure.

Description

Technical field [0001] The present invention proposes a cantilever frequency detector and preparation method based on micro -mechanical arsenidiac, which belongs to the technical field of Microelectronics Machinery System (MEMS). Background technique [0002] In the research of microwave technology, the frequency of one of the three major parameters (amplitude, phase, and frequency) of the signal is an important parameter of the microwave signal.Microwave signal frequency detection systems are extremely widely used in military, business, and scientific research.The existing microwave frequency detection technology is mainly based on the principles of external deviation and counting method. They have the advantages of high accuracy and broadband bands, but the biggest disadvantage is that it requires a more precise measuring instrument.With the development of science and technology, the requirements of modern personal communication systems and radar systems are getting higher and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R23/06
Inventor 廖小平易真翔
Owner SOUTHEAST UNIV
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